Condensation coefficients in plasma sputtering deposition
2007 ◽
Vol 40
(7)
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pp. 2121-2123
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2003 ◽
Vol 240-242
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pp. 307-310
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Keyword(s):
2000 ◽
Vol 9
(2)
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pp. 176-182
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2005 ◽
Vol 19
(30)
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pp. 4437-4447
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2004 ◽
Vol 37
(24)
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pp. 3419-3423
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Keyword(s):
2014 ◽
Vol 47
(22)
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pp. 224004
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