Blue Light Emission from Hydrogenated Amorphous Silicon Carbide Prepared by Xylene Source in Plasma-Enhanced Chemical Vapour Deposition System

Vapour Deposition ◽

Light Emission ◽

Chemical Vapour ◽

Blue Light Emission ◽

Preparation of hydrogenated amorphous silicon carbide thin films by plasma enhanced chemical vapour deposition

Vacuum ◽

10.1016/s0042-207x(98)00031-1 ◽

1998 ◽

Vol 50 (1-2) ◽

pp. 103-105 ◽

Cited By ~ 4

Author(s):

J Huran ◽

J Šafránková ◽

A.P. Kobzev

Keyword(s):

Thin Films ◽

Silicon Carbide ◽

Amorphous Silicon ◽

Vapour Deposition ◽

Chemical Vapour ◽

Red–green–blue light emission from hydrogenated amorphous silicon carbide films prepared by using organic compound xylene as carbon source

Applied Physics Letters ◽

10.1063/1.120631 ◽

1998 ◽

Vol 72 (1) ◽

pp. 13-15 ◽

Cited By ~ 30

Author(s):

Tianfu Ma ◽

Jun Xu ◽

Kunji Chen ◽

Jiafang Du ◽

Wei Li ◽

...

Keyword(s):

Silicon Carbide ◽

Organic Compound ◽

Carbon Source ◽

Amorphous Silicon ◽

Blue Light ◽

Light Emission ◽

Blue Light Emission ◽

Structural and optical properties of hydrogenated amorphous silicon carbide films by helicon wave plasma-enhanced chemical vapour deposition

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/37/23/012 ◽

2004 ◽

Vol 37 (23) ◽

pp. 3304-3308 ◽

Cited By ~ 19

Author(s):

Wei Yu ◽

Wanbing Lu ◽

Li Han ◽

Guangsheng Fu

Keyword(s):

Silicon Carbide ◽

Optical Properties ◽

Amorphous Silicon ◽

Vapour Deposition ◽

Chemical Vapour ◽

Structural And Optical Properties ◽

Helicon Wave ◽

Inductively-coupled plasma-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbide thin films for MEMS

Sensors and Actuators A Physical ◽

10.1016/j.sna.2016.05.042 ◽

2016 ◽

Vol 247 ◽

pp. 647-655 ◽

Cited By ~ 14

Author(s):

Tobias Frischmuth ◽

Michael Schneider ◽

Daniel Maurer ◽

Thomas Grille ◽

Ulrich Schmid

Keyword(s):

Thin Films ◽

Silicon Carbide ◽

Amorphous Silicon ◽

Inductively Coupled Plasma ◽

Vapour Deposition ◽

Chemical Vapour ◽

Inductively Coupled ◽

Ion-beam processing of hydrogenated amorphous silicon carbide grown by plasma-enhanced chemical vapour deposition

Philosophical Magazine B ◽

10.1080/014186300255195 ◽

2000 ◽

Vol 80 (4) ◽

pp. 539-546

Author(s):

L. Calcagno, F. Giorgis, A. Makhtari,

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Vapour Deposition ◽

Ion Beam ◽

Chemical Vapour ◽

Blue light emission from hydrogenated amorphous silicon carbide produced by organic source

10.1117/12.251894 ◽

1996 ◽

Author(s):

Jun Xu ◽

Kun-Ji Chen ◽

Tianfu Ma ◽

Jia F. Du ◽

Xinfan Huang ◽

...

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Blue Light ◽

Light Emission ◽

Blue Light Emission ◽

Hydrogenated Amorphous ◽

Organic Source

The improvement on blue light emission from hydrogenated amorphous silicon carbide films prepared from an organic source

Journal of Non-Crystalline Solids ◽

10.1016/s0022-3093(98)00100-8 ◽

1998 ◽

Vol 227-230 ◽

pp. 470-473 ◽

Cited By ~ 2

Author(s):

Jun Xu ◽

Tianfu Ma ◽

Kunji Chen ◽

Jiafang Du ◽

Xinfan Huang ◽

...

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Blue Light ◽

Light Emission ◽

Blue Light Emission ◽

Hydrogenated Amorphous ◽

Organic Source

Ion-beam processing of hydrogenated amorphous silicon carbide grown by plasma-enhanced chemical vapour deposition

Philosophical Magazine B ◽

10.1080/13642810008209762 ◽

2000 ◽

Vol 80 (4) ◽

pp. 539-546 ◽

Cited By ~ 5

Author(s):

L. Calcagno ◽

F. Giorgis ◽

A. Makhtari ◽

P. Musumeci ◽

R. Reitano

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Vapour Deposition ◽

Ion Beam ◽

Chemical Vapour ◽

Correlation between short-range order and hydrogen bonding in hydrogenated amorphous silicon obtained by homogeneous chemical vapour deposition

Philosophical Magazine B ◽

10.1080/01418639408240283 ◽

1994 ◽

Vol 70 (6) ◽

pp. 1187-1193 ◽

Cited By ~ 2

Author(s):

A. Toneva ◽

P. Danesh ◽

L. Vassilev ◽

V. Kudoyarova

Keyword(s):

Hydrogen Bonding ◽

Amorphous Silicon ◽

Short Range ◽

Short Range Order ◽

Vapour Deposition ◽

Chemical Vapour ◽

Homogeneous Chemical ◽

Plasma Enhanced Chemical Vapour Deposition of Hydrogenated Amorphous Silicon from Dichlorosilane and Silane Gas Mixtures

Japanese Journal of Applied Physics ◽

10.1143/jjap.34.l536 ◽

1995 ◽

Vol 34 (Part 2, No. 5A) ◽

pp. L536-L538 ◽

Cited By ~ 17

Author(s):

Ian S. Osborne ◽

Nobuhiro Hata ◽

Akihisa Matsuda

Keyword(s):

Amorphous Silicon ◽

Vapour Deposition ◽

Chemical Vapour ◽

Gas Mixtures ◽