Role of Hydrogen Dilution in the Low-Temperature Growth of Nanocrystalline Si:H Thin Films from SiH4/H2Mixture
2009 ◽
Vol 11
(3)
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pp. 297-301
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2008 ◽
Vol 354
(19-25)
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pp. 2079-2082
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1991 ◽
Vol 181
(4-6)
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pp. 369-373
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2000 ◽
Vol 71
(2)
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pp. 1002-1005
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2004 ◽
Vol 7
(4)
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pp. G62
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1999 ◽
Vol 59
(2)
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pp. 120-124
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2001 ◽
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2019 ◽
Vol 7
(6)
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pp. 244-250
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