scholarly journals The microstructure of Si surface layers after He+ Ar+plasma immersion ion implantation

2013 ◽  
Vol 471 ◽  
pp. 012049
Author(s):  
J M Chesnokov ◽  
A L Vasiliev ◽  
V F Lukichev ◽  
K V Rudenko
Keyword(s):  
Ion Implantation ◽  
Surface Layers ◽  
Plasma Immersion Ion Implantation ◽  
Ar Plasma

Structural phase states in nickel-titanium surface layers doped with silicon by plasma immersion ion implantation

2015 ◽  
Author(s):  
Oleg A. Kashin ◽  
Aleksandr I. Lotkov ◽  
Andrey N. Kudryashov ◽  
Konstantin V. Krukovsky ◽  
Marina G. Ostapenko ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Titanium Surface ◽  
Structural Phase ◽  
Nickel Titanium ◽  
Surface Layers ◽  
Plasma Immersion Ion Implantation

scholarly journals Study of silicon surface layers modified by hydrogen plasma immersion ion implantation and oxidation

2020 ◽  
Vol 1492 ◽  
pp. 012056
Author(s):  
A Szekeres ◽  
S Alexandrova ◽  
P Terziyska ◽  
M Anastasescu ◽  
M Stoica ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Silicon Surface ◽  
Hydrogen Plasma ◽  
Surface Layers ◽  
Plasma Immersion Ion Implantation

TiN/ZrO2 multilayers synthesized on GCr15 bearing steel using plasma immersion ion implantation and deposition

2007 ◽  
Vol 201 (15) ◽  
pp. 6615-6618 ◽  
Author(s):  
Tao Sun ◽  
Langping Wang ◽  
Yonghao Yu ◽  
Yuhang Wang ◽  
Xiaofeng Wang ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Bearing Steel ◽  
Gcr15 Bearing Steel ◽  
Plasma Immersion Ion Implantation
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