Fabrication of low loss polyimide optical waveguides using thin-film multichip module process technology

IEEE Transactions on Components Packaging and Manufacturing Technology Part B ◽

10.1109/96.386246 ◽

1995 ◽

Vol 18 (2) ◽

pp. 232-234 ◽

Author(s):

A.J. Beuhler ◽

D.A. Wargowski ◽

K.D. Singer ◽

T. Kowalczyk

Keyword(s):

Thin Film ◽

Optical Waveguides ◽

Multichip Module ◽

Process Technology ◽

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Fabrication of low loss polyimide optical waveguides using thin-film multichip module process technology

1994 Proceedings. 44th Electronic Components and Technology Conference ◽

10.1109/ectc.1994.367609 ◽

2002 ◽

Author(s):

A.J. Beuhler ◽

D.A. Wargowski ◽

K.D. Singer ◽

T. Kowalczyk

Keyword(s):

Thin Film ◽

Optical Waveguides ◽

Multichip Module ◽

Process Technology ◽

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Low-loss polymer thin-film optical waveguides

10.1117/12.25836 ◽

1991 ◽

Author(s):

Peerouz M. Amleshi ◽

David L. Naylor

Keyword(s):

Thin Film ◽

Optical Waveguides ◽

Low Loss ◽

Polymer Thin Film

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Corning 7059, Silicon Oxynitride, and Silicon Dioxide Thin-Film Integrated Optical Waveguides: In Search of Low Loss, Nonfluorescent, Reusable Glass Waveguides

Applied Spectroscopy ◽

10.1366/0003702924123818 ◽

1992 ◽

Vol 46 (9) ◽

pp. 1437-1441 ◽

Author(s):

D. S. Walker ◽

W. M. Reichert ◽

C. J. Berry

Keyword(s):

Thin Film ◽

Silicon Dioxide ◽

Optical Waveguides ◽

Silicon Oxynitride ◽

Low Loss ◽

Glass Waveguides ◽

Integrated Optical ◽

Integrated Optical Waveguides

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Extremely low‐loss glass thin‐film optical waveguides utilizing surface coating and laser annealing

Journal of Applied Physics ◽

10.1063/1.329854 ◽

1981 ◽

Vol 52 (6) ◽

pp. 3873-3875 ◽

Author(s):

Subhadra Dutta ◽

Howard E. Jackson ◽

J. T. Boyd

Keyword(s):

Thin Film ◽

Surface Coating ◽

Optical Waveguides ◽

Laser Annealing ◽

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Featuring thin films. Handbook of Thin Film Process Technology. Edited byD. A. Glocker andS. I. Shah, Institute of Physics, Bristol 1995, XII, 798 pp., ring-bound softcover, £300, ISBN 0-7503-0311-5

Chemical Vapor Deposition ◽

10.1002/cvde.19970030306 ◽

1997 ◽

Vol 3 (3) ◽

pp. 144-145

Author(s):

Michael L. Hitchman

Keyword(s):

Thin Film ◽

Process Technology ◽

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A new GaAs MMIC process technology using 0.5 mu m gate asymmetric LDD structure GaAs BP-MESFETs combined with high-dielectric-constant thin-film capacitors

Semiconductor Science and Technology ◽

10.1088/0268-1242/10/11/017 ◽

1995 ◽

Vol 10 (11) ◽

pp. 1534-1540 ◽

Author(s):

M Nishitsuji ◽

T Uda ◽

T Yokoyama ◽

K Fujimoto ◽

K Nishii ◽

...

Keyword(s):

Thin Film ◽

Dielectric Constant ◽

High Dielectric Constant ◽

Process Technology ◽

Thin Film Capacitors ◽

High Dielectric

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The application of laser process technology to thin film packaging

IEEE Transactions on Components Hybrids and Manufacturing Technology ◽

10.1109/33.214854 ◽

1993 ◽

Vol 16 (1) ◽

pp. 6-12 ◽

Author(s):

T.F. Redmond ◽

J.R. Lankard ◽

J.G. Balz ◽

G.R. Proto ◽

T.A. Wassick

Keyword(s):

Thin Film ◽

Process Technology ◽

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Design and development of low loss microstrip band pass filters by using YBCO- high temperature superconducting thin film

2008 International Conference on Recent Advances in Microwave Theory and Applications ◽

10.1109/amta.2008.4762964 ◽

2008 ◽

Author(s):

Jagdish Shivhare

Keyword(s):

Thin Film ◽

High Temperature ◽

Low Loss ◽

Design And Development ◽

Superconducting Thin Film ◽

High Temperature Superconducting ◽

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Development of a low-loss multilayered broadband balun using twin-thickness thin-film

IEEE MTT-S International Microwave Symposium Digest, 2005. ◽

10.1109/mwsym.2005.1516902 ◽

2006 ◽

Author(s):

A.C. Chen ◽

A. Pham ◽

R.E. Leoni

Keyword(s):

Thin Film ◽

Low Loss ◽

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Low‐loss integrated optical waveguides fabricated by nitrogen ion implantation

Applied Physics Letters ◽

10.1063/1.94423 ◽

1983 ◽

Vol 43 (6) ◽

pp. 519-520 ◽

Author(s):

I. K. Naik

Keyword(s):

Ion Implantation ◽

Optical Waveguides ◽

Low Loss ◽

Nitrogen Ion Implantation ◽

Integrated Optical ◽

Nitrogen Ion ◽

Integrated Optical Waveguides

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