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Hang Liu ◽  
Yuqi Liu ◽  
Hao Chen ◽  
Quanjun Liu ◽  
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Fabrication And Characterization

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Katsumi Yoshida ◽  
Toyohiko Yano ◽  
Shuhei Miwa ◽  
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Myung-Ki Kim ◽  
Yong-Hee Lee ◽  
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scholarly journals Fabrication and characterization of PECVD silicon nitride for RF MEMS applications

2012 ◽  
Vol 19 (1) ◽  
pp. 131-136 ◽  
Author(s):  
H. U. Rahman ◽  
B. C. Johnson ◽  
J. C. Mccallum ◽  
E. Gauja ◽  
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Lab on a Chip ◽  
2005 ◽  
Vol 5 (3) ◽  
pp. 326 ◽  
Author(s):  
R. M. Tiggelaar ◽  
J. W. Berenschot ◽  
J. H. de Boer ◽  
R. G. P. Sanders ◽  
J. G. E. Gardeniers ◽  
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Author(s):  
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Walid M. Daoush ◽  
Ahmed E. El-Nikhaily
Keyword(s):  
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Fabrication And Characterization
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