Electromechanical modeling and characterization of the electrical breakdown for the capacitive microarrayed ultrasonic transducers

2010 ◽  
Author(s):  
Te-I Chiu ◽  
Shi-Bing Luo ◽  
Tsai-Chu Hsiao
Keyword(s):  
Electrical Breakdown ◽  
Ultrasonic Transducers ◽  
Electromechanical Modeling

Application of Aluminum Nitride Thin Film for Micromachined Ultrasonic Transducers

2005 ◽  
Vol 892 ◽  
Author(s):  
Qianghua Wang ◽  
Jianzeng Xu ◽  
Changhe Huang ◽  
Gregory W Auner
Keyword(s):  
Thin Films ◽  
Aluminum Nitride ◽  
Ultrasonic Transducers ◽  
X Ray Diffraction ◽  
Effective Coupling ◽  
Resonant Frequencies ◽  
X Ray ◽  
Coupling Factors ◽  
Sandwiched Structure

AbstractThis paper reports the fabrication and characterization of micromachined ultrasonic transducers (MUT) based on piezoelectric aluminum nitride (AlN) thin films. The MUT device is composed of an Al/AlN/Al sandwiched structure overlaid on top of a silicon (Si) diaphragm. X-ray diffraction (XRD) scan shows that highly c-axis oriented AlN (002) thin films have been grown on Al/Si(100) substrates. Electrical impedance of the MUT devices is analyzed as a function of frequency. The fundamental resonant frequencies of the devices are found in the range of 65-70 kHz, which are in approximation to the theoretical calculation. The effective coupling factors of the devices are also derived as 0.18.

scholarly journals Design and characterization of immersion ultrasonic transducers for pulsed regime applications

2018 ◽  
Vol 47 (2) ◽  
pp. 213-232
Author(s):  
Francesc Suñol ◽  
Diego A. Ochoa ◽  
Laura R. Suñé ◽  
Jose E. García
Keyword(s):  
Ultrasonic Transducers ◽  
Pulsed Regime

Simulation and Characterization of Piezoelectric Micromachined Ultrasonic Transducers (PMUT's) Based on PZT/SOI Membranes

2003 ◽  
Vol 54 (1) ◽  
pp. 557-564 ◽  
Author(s):  
Jacek Baborowski ◽  
Nicolas Ledermann ◽  
Paul Muralt ◽  
Daniel Schmitt
Keyword(s):  
Ultrasonic Transducers

Characterization of bone materials as ultrasonic transducers

Biomaterials ◽  
1986 ◽  
Vol 7 (6) ◽  
pp. 432-437 ◽  
Author(s):  
Surendra Singh ◽  
Harcharan Singh Ranu
Keyword(s):  
Ultrasonic Transducers
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