A capacitive pressure sensor with minimum foot print for CMOS integration

2014 ◽  
Author(s):  
Thoralf Kautzsch ◽  
Steffen Bieselt
Keyword(s):  
Pressure Sensor ◽  
Capacitive Pressure Sensor

Development of circuit solution and design of capacitive pressure sensor array for applied robotics

2020 ◽  
Vol 8 (4) ◽  
pp. 296-307
Author(s):  
Konstantin Krestovnikov ◽  
Aleksei Erashov ◽  
Аleksandr Bykov
Keyword(s):  
Pressure Sensor ◽  
Output Signal ◽  
Sensor Array ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Fine Tuning ◽  
Capacitive Pressure Sensor ◽  
Cell Parameters ◽  
Linear Pattern ◽  
Sensor Structure

This paper presents development of pressure sensor array with capacitance-type unit sensors, with scalable number of cells. Different assemblies of unit pressure sensors and their arrays were considered, their characteristics and fabrication methods were investigated. The structure of primary pressure transducer (PPT) array was presented; its operating principle of array was illustrated, calculated reference ratios were derived. The interface circuit, allowing to transform the changes in the primary transducer capacitance into voltage level variations, was proposed. A prototype sensor was implemented; the dependency of output signal power from the applied force was empirically obtained. In the range under 30 N it exhibited a linear pattern. The sensitivity of the array cells to the applied pressure is in the range 134.56..160.35. The measured drift of the output signals from the array cells after 10,000 loading cycles was 1.39%. For developed prototype of the pressure sensor array, based on the experimental data, the average signal-to-noise ratio over the cells was calculated, and equaled 63.47 dB. The proposed prototype was fabricated of easily available materials. It is relatively inexpensive and requires no fine-tuning of each individual cell. Capacitance-type operation type, compared to piezoresistive one, ensures greater stability of the output signal. The scalability and adjustability of cell parameters are achieved with layered sensor structure. The pressure sensor array, presented in this paper, can be utilized in various robotic systems.

Flexible M-Tooth Hybrid Micro-Structure Based Capacitive Pressure Sensor with High Sensitivity and Wide Sensing Range

2021 ◽  
pp. 1-1
Author(s):  
Valliammai Palaniappan ◽  
Masoud Panahi ◽  
Dinesh Maddipatla ◽  
Xingzhe Zhang ◽  
Simin Masihi ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
High Sensitivity ◽  
Capacitive Pressure Sensor ◽  
Micro Structure ◽  
Sensing Range

A complete analytical model for clamped edge circular diaphragm non-touch and touch mode capacitive pressure sensor

2015 ◽  
Vol 22 (5) ◽  
pp. 1143-1150 ◽  
Author(s):  
Sumit Kumar Jindal ◽  
Ankush Mahajan ◽  
Sanjeev Kumar Raghuwanshi
Keyword(s):  
Analytical Model ◽  
Pressure Sensor ◽  
Capacitive Pressure Sensor ◽  
Circular Diaphragm ◽  
Clamped Edge

Wireless LTCC-based capacitive pressure sensor for harsh environment

2013 ◽  
Vol 197 ◽  
pp. 30-37 ◽  
Author(s):  
Jijun Xiong ◽  
Ying Li ◽  
Yingping Hong ◽  
Binzhen Zhang ◽  
Tianhong Cui ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Harsh Environment ◽  
Capacitive Pressure Sensor

An implantable capacitive pressure sensor for biomedical applications

2007 ◽  
Vol 134 (2) ◽  
pp. 382-388 ◽  
Author(s):  
Chia-Chu Chiang ◽  
Chou-Ching K. Lin ◽  
Ming-Shuang Ju
Keyword(s):  
Pressure Sensor ◽  
Biomedical Applications ◽  
Capacitive Pressure Sensor
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