Characterization and modeling of the trench surface inversion problem for the trench isolated CMOS technology
1983 ◽
Vol 4
(9)
◽
pp. 303-305
◽
1986 ◽
pp. 199-216
Keyword(s):
Keyword(s):
1988 ◽
Vol 49
(C4)
◽
pp. C4-421-C4-424
◽
2009 ◽
Vol E92-C
(6)
◽
pp. 822-827
◽
2018 ◽
Vol 6
(6)
◽
pp. 936-939