First adhesion measurements of conductive ultrananocrystalline diamond MEMS sidewalls

2014 ◽  
Author(s):  
Federico Buja ◽  
Jaap Kokorian ◽  
Anirudha V. Sumant ◽  
W. Merlijn van Spengen
Keyword(s):  
Ultrananocrystalline Diamond ◽  
Diamond Mems

Ultrananocrystalline and Nanocrystalline Diamond Thin Films for MEMS/NEMS Applications

MRS Bulletin ◽  
2010 ◽  
Vol 35 (4) ◽  
pp. 281-288 ◽  
Author(s):  
Anirudha V. Sumant ◽  
Orlando Auciello ◽  
Robert W. Carpick ◽  
Sudarsan Srinivasan ◽  
James E. Butler
Keyword(s):  
Thin Films ◽  
Piezoelectric Materials ◽  
Cmos Technology ◽  
Nanocrystalline Diamond ◽  
Suitable Material ◽  
Force Microscopy ◽  
Ultrananocrystalline Diamond ◽  
Diamond Mems ◽  
Key Aspects ◽  
Tribomechanical Properties

AbstractThere has been a tireless quest by the designers of micro- and nanoelectro mechanical systems (MEMS/NEMS) to find a suitable material alternative to conventional silicon. This is needed to develop robust, reliable, and long-endurance MEMS/NEMS with capabilities for working under demanding conditions, including harsh environments, high stresses, or with contacting and sliding surfaces. Diamond is one of the most promising candidates for this because of its superior physical, chemical, and tribomechanical properties. Ultrananocrystalline diamond (UNCD) and nanocrystalline diamond (NCD) thin films, the two most studied forms of diamond films in the last decade, have distinct growth processes and nanostructures but complementary properties. This article reviews the fundamental and applied science performed to understand key aspects of UNCD and NCD films, including the nucleation and growth, tribomechanical properties, electronic properties, and applied studies on integration with piezoelectric materials and CMOS technology. Several emerging diamond-based MEMS/NEMS applications, including high-frequency resonators, radio frequency MEMS and photonic switches, and the first commercial diamond MEMS product—monolithic diamond atomic force microscopy probes—are discussed.

Ultrananocrystalline diamond‐like carbon (UN‐DLC) assembled on epitaxial ZnO film by PLD technique and SIMS Raman Rutherford spectroscopic fingerprint investigation

2021 ◽  
Author(s):  
Manikandan Elayaperumal ◽  
Kavitha Gnanasekaran ◽  
Mathew K. Moodley ◽  
Bonex Wakufwa Mwakikunga ◽  
Ravinder Gaur ◽  
...  
Keyword(s):  
Diamond Like Carbon ◽  
Zno Film ◽  
Ultrananocrystalline Diamond

scholarly journals Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies

2021 ◽  
Vol 56 (12) ◽  
pp. 7171-7230
Author(s):  
Orlando Auciello ◽  
Dean M. Aslam
Keyword(s):  
Materials Science ◽  
Positive Impact ◽  
Diamond Films ◽  
Energy Generation ◽  
Nanoelectromechanical Systems ◽  
Environmental Sensors ◽  
Implantable Biosensors ◽  
Ultrananocrystalline Diamond ◽  
Film Synthesis ◽  
New Generation

AbstractA comprehensive review is presented on the advances achieved in past years on fundamental and applied materials science of diamond films and engineering to integrate them into new generations of microelectromechanical system (MEMS) and nanoelectromechanical systems (NEMS). Specifically, the review focuses on describing the fundamental science performed to develop thin film synthesis processes and the characterization of chemical, mechanical, tribological and electronic properties of microcrystalline diamond, nanocrystalline diamond and ultrananocrystalline diamond films technologies, and the research and development focused on the integration of the diamond films with other film-based materials. The review includes both theoretical and experimental work focused on optimizing the films synthesis and the resulting properties to achieve the best possible MEMS/NEMS devices performance to produce new generation of MEMS/NEMS external environmental sensors and energy generation devices, human body implantable biosensors and energy generation devices, electron field emission devices and many more MEMS/NEMS devices, to produce transformational positive impact on the way and quality of life of people worldwide.

A novel growth model for depositing ultrananocrystalline diamond films in CH4/H2 chemistry

2021 ◽  
pp. 127280
Author(s):  
Qiang Lin ◽  
Sulin Chen ◽  
Zhe Ji ◽  
Zhewei Huang ◽  
Zhinan Zhang ◽  
...  
Keyword(s):  
Growth Model ◽  
Diamond Films ◽  
Ultrananocrystalline Diamond
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