X-Ray Measurements during Whistler-Mode Electron Cyclotron Resonance Plasma Startup and Heating in an Axisymmetric Magnetic Mirror

Electron Cyclotron ◽

Magnetic Mirror ◽

Whistler Mode ◽

X Ray ◽

Experiments on whistler mode electron-cyclotron resonance plasma startup and heating in an axisymmetric magnetic mirror

The Physics of Fluids ◽

10.1063/1.865353 ◽

1985 ◽

Vol 28 (10) ◽

pp. 3116 ◽

Cited By ~ 30

Author(s):

J. H. Booske ◽

W. D. Getty ◽

R. M. Gilgenbach ◽

R. A. Jong

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron ◽

Magnetic Mirror ◽

Whistler Mode ◽

X-ray photoelectron diffraction observation of β-SiC(001) obtained by electron cyclotron resonance plasma assisted growth on Si(001)

Applied Surface Science ◽

10.1016/0169-4332(93)90239-8 ◽

1993 ◽

Vol 68 (4) ◽

pp. 575-582 ◽

Cited By ~ 20

Author(s):

M. Diani ◽

J.L. Bischoff ◽

L. Kubler ◽

D. Bolmont

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron ◽

X Ray ◽

Photoelectron Diffraction ◽

Experimental studies on a compact electron cyclotron resonance plasma x-ray source

Review of Scientific Instruments ◽

10.1063/1.1149821 ◽

1999 ◽

Vol 70 (6) ◽

pp. 2637-2645 ◽

Cited By ~ 15

Author(s):

R. Baskaran ◽

T. S. Selvakumaran

Keyword(s):

Cyclotron Resonance ◽

Experimental Studies ◽

Electron Cyclotron ◽

X Ray ◽

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

SiC x-ray lithography mask fabricated by electron cyclotron resonance plasma source coupled with divided microwaves

10.1116/1.589378 ◽

1997 ◽

Vol 15 (3) ◽

pp. 736 ◽

Cited By ~ 2

Author(s):

Masaru Shimada

Keyword(s):

Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

X Ray ◽

Ultrahigh-Vacuum Electron Cyclotron Resonance-Plasma Chemical-Vapor-DepositedSiNxFilms for X-Ray Lithography Mask Membrane: As-Deposited Properties and Radiation Stability

Japanese Journal of Applied Physics ◽

10.1143/jjap.33.6908 ◽

1994 ◽

Vol 33 (Part 1, No. 12B) ◽

pp. 6908-6912 ◽

Cited By ~ 1

Author(s):

Jinho Ahn ◽

Katsumi Suzuki ◽

Shinji Tsuboi ◽

Yoshio Yamashita

Keyword(s):

Cyclotron Resonance ◽

Ultrahigh Vacuum ◽

Chemical Vapor ◽

Radiation Stability ◽

Electron Cyclotron ◽

Plasma Chemical ◽

X Ray ◽

Lower Hybrid Heating of an Electron-Cyclotron-Resonance Plasma in a Canted Magnetic Mirror

IEEE Transactions on Plasma Science ◽

10.1109/tps.1976.4316984 ◽

1976 ◽

Vol 4 (4) ◽

pp. 296-297

Author(s):

W. A. Friedrich ◽

J. L. Shohet

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron ◽

Magnetic Mirror ◽

Lower Hybrid ◽

Hybrid Heating ◽

Two-slope soft X-ray spectra observed in experiments on electron cyclotron resonance plasma heating in the L-2M stellarator

Plasma Physics Reports ◽

10.1134/s1063780x17060113 ◽

2017 ◽

Vol 43 (6) ◽

pp. 599-604 ◽

Cited By ~ 5

Author(s):

A. I. Meshcheryakov ◽

I. Yu. Vafin ◽

I. A. Grishina ◽

A. A. Letunov ◽

M. A. Tereshchenko

Keyword(s):

Cyclotron Resonance ◽

Plasma Heating ◽

Electron Cyclotron ◽

X Ray ◽

Electron cyclotron resonance plasma enhanced direct current sputtering discharge with magnetic-mirror plasma confinement

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580660 ◽

1997 ◽

Vol 15 (4) ◽

pp. 1922-1928 ◽

Cited By ~ 12

Author(s):

M. Mišina ◽

Y. Setsuhara ◽

S. Miyake

Keyword(s):

Direct Current ◽

Cyclotron Resonance ◽

Electron Cyclotron ◽

Magnetic Mirror ◽

Plasma Confinement ◽

Direct Current Sputtering ◽

Influence of the shear flow on electron cyclotron resonance plasma confinement in an axisymmetric magnetic mirror trap of the electron cyclotron resonance ion source

Review of Scientific Instruments ◽

10.1063/1.3666187 ◽

2012 ◽

Vol 83 (2) ◽

pp. 02A318

Author(s):

I. V. Izotov ◽

S. V. Razin ◽

A. V. Sidorov ◽

V. A. Skalyga ◽

V. G. Zorin ◽

...

Keyword(s):

Shear Flow ◽

Cyclotron Resonance ◽

Ion Source ◽

Electron Cyclotron ◽

Magnetic Mirror ◽

Plasma Confinement ◽

Electron Cyclotron Resonance Plasma Etching of α-Ta for X-Ray Mask Absorber Using Chlorine and Fluoride Gas Mixture

Japanese Journal of Applied Physics ◽

10.1143/jjap.39.6914 ◽

2000 ◽

Vol 39 (Part 1, No. 12B) ◽

pp. 6914-6918 ◽

Cited By ~ 3

Author(s):

Tai Tsuchizawa ◽

Hiroki Iriguchi ◽

Chiharu Takahashi ◽

Masaru Shimada ◽

Shingo Uchiyama ◽

...

Keyword(s):

Plasma Etching ◽

Cyclotron Resonance ◽

Electron Cyclotron ◽

Gas Mixture ◽

X Ray ◽