High-Efficiency Inductively Coupled Plasma Source With Dual Antenna Hybrid Scheme
2018 ◽
Vol 46
(4)
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pp. 954-961
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2002 ◽
Vol 20
(5)
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pp. 1566-1573
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Keyword(s):
2014 ◽
Vol 85
(1)
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pp. 013510
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1983 ◽
Vol 2
(10)
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pp. 225-230
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Keyword(s):
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1996 ◽
Vol 143
(4)
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pp. 1375-1383
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2004 ◽
Vol 19
(1)
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pp. 149
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Keyword(s):
2012 ◽
Vol 27
(6)
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pp. 989
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Keyword(s):
1981 ◽
Vol 33
(1-4)
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pp. 141-153
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2008 ◽
Vol 18
(1)
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pp. 014010
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