Research on a joint mechanical and electrical simulation platform of a step-and-scan lithography based on the state-space finite element model
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2018 ◽
Vol 37
(4)
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pp. 1201-1218
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2021 ◽
Vol 71
(1)
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pp. 87-106
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2002 ◽
Vol 124
(2)
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pp. 265-276
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2012 ◽
Vol 178-181
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pp. 1601-1604
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