Nonlinear least squares regression for single image scanning electron microscope signal-to-noise ratio estimation

2016 ◽  
Vol 264 (2) ◽  
pp. 159-174 ◽  
Author(s):  
K.S. SIM ◽  
S. NORHISHAM
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Signal To Noise Ratio ◽  
Nonlinear Least Squares ◽  
Ratio Estimation ◽  
Least Squares Regression ◽  
Single Image ◽  
Signal To Noise ◽  
Image Scanning ◽  
Scanning Electron

Observation of Semiconductor Superstructures With Backscattered Electrons in a Scanning Electron Microscope

1994 ◽  
Vol 354 ◽  
Author(s):  
A. Bosacchi ◽  
S. Franchi ◽  
D. Govoni ◽  
G. Mattei ◽  
P.G. Merli ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Signal To Noise Ratio ◽  
Beam Size ◽  
Signal To Noise ◽  
Backscattered Electrons ◽  
Imaging Mode ◽  
Noise Ratio ◽  
Scanning Electron

AbstractObservations of semiconductor superstructures with backscattered electrons in a scanning electron microscope have been used to revisit the concept of resolution of the backscattering imaging mode. It will be shown that the generation volume doesn't represent in itself a limit to the resolution, which depends only on the beam size and the signal to noise ratio.

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