Design Methodology for Microelectromechanical Systems. Case Study: Torsional Scanner Mirror

Future optical microsystems, such as microelectromechanical system (MEMS) scanners and micromirrors, will extend the resolution and sensitivity offered by their predecessors. These systems face the challenge of achieving nanometer precision subjected to various disturbances. Predicting the performance of such systems early in the design process can significantly impact the design cost and also improve the quality of the design. Our approach aims to predict the performance of such systems under various disturbance sources and develop a generalized design approach for MEMS structures. In this study, we used ANSYS for modeling and dynamic analysis of a torsional MEMS scanner mirror. ANSYS modal analysis results, which are eigenvalues (natural frequencies) and eigenvectors (mode shapes), are used to obtain the state-space representation of the mirror. The state-space model of the scanner mirror was reduced using various reduction techniques to eliminate the states that are insignificant for the transfer functions of interest. The results of these techniques were compared to obtain the best approach to obtain a lower order model that still contains all the relevant dynamics of the original model. After the model size is reduced significantly, a disturbance analysis is performed using Lyapunov approach to obtain root-mean-square values of the mirror rotation angle under the effect of a disturbance torque. The magnitude levels of the disturbance torque are obtained using an experimental procedure. The disturbance analysis framework is combined with the sensitivity analysis to determine the critical design parameters for optimizing the system performance.

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Dynamic Analysis of a Torsional MEMS Scanner Mirror: Part 1 — Disturbance Analysis Framework

Volume 1: 20th Biennial Conference on Mechanical Vibration and Noise, Parts A, B, and C ◽

10.1115/detc2005-85225 ◽

2005 ◽

Author(s):

Faik Can Meral ◽

Ipek Basdogan

Keyword(s):

State Space ◽

Transfer Functions ◽

State Space Model ◽

Time Domain Analysis ◽

The State ◽

Space Representation ◽

Modeling And Analysis ◽

Lyapunov Approach ◽

State Space Representation ◽

Disturbance Analysis

Future optical micro systems such as Micro Electro Mechanical Systems (MEMS) scanners and micro-mirrors will extend the resolution and sensitivity offered by their predecessors. These systems face the challenge of achieving nanometer precision subjected to various disturbances. Predicting the performance of such systems early in the design process can significantly impact the design cost and also improve the quality of the design. Our approach aims to predict the performance of such systems under various disturbance sources and develop a generalized design approach for MEMS structures. In this study, we used ANSYS for modeling and analysis of a torsional MEMS scanner mirror. ANSYS modal analysis results, which are eigenvalues (natural frequencies) and eigenvectors (modeshapes), are used to obtain the state space representation of the mirror. The state space model of the scanner mirror was reduced using various reduction techniques to eliminate the states that are insignificant for the transfer functions of interest. The results of these techniques were compared to obtain the best approach to obtain a lower order model that still contains all of the relevant dynamics of the original model. After the model size is reduced significantly, a disturbance analysis is performed using Lyapunov approach to obtain root-mean-square (RMS) values of the mirror rotation angle under the effect of a disturbance torque. The Lyapunov approach results were validated using a time domain analysis.

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Transient Flow Simulation in Natural Gas Pipelines Using the State Space Model

ASME 2010 10th Biennial Conference on Engineering Systems Design and Analysis, Volume 3 ◽

10.1115/esda2010-24433 ◽

2010 ◽

Author(s):

M. Behbahani-Nejad ◽

A. Ghanbarzadeh ◽

R. Alamian

Keyword(s):

Finite Difference ◽

State Space ◽

Transient Flow ◽

Transfer Functions ◽

State Space Model ◽

Method Of Lines ◽

Flow Simulation ◽

The State ◽

Finite Difference Schemes ◽

Gas Pipelines

A transient flow simulation for gas pipelines and networks is proposed. The proposed transient flow simulation is based on the state space equations. The equivalent transfer functions of the nonlinear governing equations are derived for different boundary conditions types. Next, the state space equations are derived from the transfer functions. To verify the accuracy of the proposed simulation, the results obtained are compared with those of the conventional finite difference schemes (such as total variation diminishing algorithms, method of lines, and other finite difference implicit and explicit schemes). The effect of the flow inertia is incorporated in this simulation. The accuracy and computational efficiency of the proposed method are discussed for a single gas pipeline and a sample gas network.

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Generic Modeling and Control of an Open-Circuit Piston Pump—Part II: Control Strategies and Designs

Journal of Dynamic Systems Measurement and Control ◽

10.1115/1.4032554 ◽

2016 ◽

Vol 138 (4) ◽

Cited By ~ 1

Author(s):

Shu Wang

Keyword(s):

State Space ◽

Control Strategies ◽

State Space Model ◽

Control Valve ◽

Open Circuit ◽

The State ◽

Operating Conditions ◽

Torque Control ◽

Space Representation ◽

Load Pressure

Hydromechanical compensators are often integrated with piston-type pumps to produce various control behavior, for example, pressure, load-sensing, power, or torque control. Various hydromechanical mechanisms (e.g., spring forces and load pressure) are found in the industry to ensure the desired effect of the system outputs: swash angle, discharge pressure, and input torque following the reference inputs. In a companion paper (Part I of this paper), a generic linearized state-space model is derived to investigate the pump dynamics and determine the design criteria and parameters. In the study, the state-space equations are used to propose and define the generic compensating control pump to conduct the similar strategies as hydromechanical pumps do. The different control purposes (pressure/flow/power compensating) are accomplished by only manipulating the generic regulate inputs given by an electrical proportional control valve. In the open-circuit pump, the generic controllers are proposed to generate these inputs by using one unique mechanical and electronic architecture to establish various purposes of flow, pressure, torque desired control, and even more control objectives. The controller is developed in accordance with the state-space representation and by following the models of the hydromechanical compensators that can facilitate the correlation verification. The proposed controllers are able to offer more intelligent and cost-saving control strategies for open-circuit piston pumps. To achieve the similar performance as hydromechanical compensators do and implement the comparative study, control gains and settings in the controller can be determined from ones that hydromechanical compensators have. The difference is that electronic signals (swash plate position, pressure, etc.) work as feedbacks together with other control gains to regulate the input signals. For the different control purposes, control gains are able to be set conveniently for the various control operating conditions with combining the certain feedbacks on the same hardware platform that will be value efficient and capable of control intelligence. In the paper, results of predictions made by the model are presented and compared with some experimental data of hydromechanical designs. Further work on the advanced model-based control and estimation is anticipated to be addressed.

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H2 Optimization of Damped-Vibration Absorbers for Suppressing Vibrations in Beams With Constrained Minimization

Journal of Vibration and Acoustics ◽

10.1115/1.4026246 ◽

2014 ◽

Vol 136 (2) ◽

Cited By ~ 9

Author(s):

Murat Tursun ◽

Eşref Eşkinat

Keyword(s):

State Space ◽

The State ◽

Mode Shapes ◽

Space Representation ◽

Vibration Absorbers ◽

State Space Representation ◽

Lagrange’S Equation ◽

System Output ◽

External Forces ◽

Mass Spring

Vibration absorbers are efficient and robust tools for reducing vibration and noise. Researchers use various alternative approaches and validate their methods with examples consisting of mass-spring-damper systems. Focusing on the minimization of the vibration amplitudes via passive absorber approach, a new and efficient method for calculating the optimum parameters of N absorbers attached to a uniform beam with M mode shapes (where N and M are any positive integers) has been developed. First, for the most general case, dissipation due to damping, kinetic, and potential energy and the effects of external forces are analyzed. The Lagrange's equation is used to provide the state space representation of the system. State space representation of a system with N absorbers and M mode shapes is composed. On the basis of the state space representation and the Lyapunov function, the H2 norm of the transfer function of the system is utilized in the newly developed optimization package. The system output is minimized by the optimization algorithm and displayed with a comparison between cases without an absorber and with randomly selected absorber parameters. As a conclusion, with the help of this method for calculation of optimal absorber parameters, one can easily design a mechanical system according to design criteria.

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An investigation into a state space model for an attenuator in automotive hydraulic systems

Proceedings of the Institution of Mechanical Engineers Part D Journal of Automobile Engineering ◽

10.1243/095440703762702987 ◽

2003 ◽

Vol 217 (1) ◽

pp. 63-67 ◽

Cited By ~ 2

Author(s):

J-C Lee

Keyword(s):

State Space ◽

Time Domain ◽

State Space Model ◽

The State ◽

Dynamic Responses ◽

Space Representation ◽

Response Analysis ◽

Space Model ◽

Electrical Analogy ◽

The Time Domain

A hydraulic attenuator has been used in hydraulic active suspension systems of automotive vehicles to reduce high amplitude ripple pressure of a pump. The hydraulic attenuator considered in this study is so highly non-linear and of high order that the analysis in the time domain has been performed infrequently, although the frequency response analysis with the transfer matrix method was applicable. In this paper, a state space representation of the dynamics for a hydraulic attenuator is presented, utilizing the electrical analogy. The results of the experiment are compared with those of the simulation to validate the state space model proposed. The comparison reveals that the state space model proposed is practically applicable for estimating the dynamic responses of the hydraulic attenuator in the time domain.

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Modeling of CCLP in koryo extract production

Chemical Product and Process Modeling ◽

10.1515/cppm-2020-0007 ◽

2020 ◽

Vol 0 (0) ◽

Author(s):

Ji Chol ◽

Ri Jun Il

Keyword(s):

Process Control ◽

Medical Care ◽

State Space ◽

State Space Model ◽

The State ◽

Space Model ◽

Effective Components ◽

Counter Current

Abstract The modeling of counter-current leaching plant (CCLP) in Koryo Extract Production is presented in this paper. Koryo medicine is a natural physic to be used for a diet and the medical care. The counter-current leaching method is mainly used for producing Koryo medicine. The purpose of the modeling in the previous works is to indicate the concentration distributions, and not to describe the model for the process control. In literature, there are no nearly the papers for modeling CCLP and especially not the presence of papers that have described the issue for extracting the effective components from the Koryo medicinal materials. First, this paper presents that CCLP can be shown like the equivalent process consisting of two tanks, where there is a shaking apparatus, respectively. It allows leachate to flow between two tanks. Then, this paper presents the principle model for CCLP and the state space model on based it. The accuracy of the model has been verified from experiments made at CCLP in the Koryo Extract Production at the Gang Gyi Koryo Manufacture Factory.

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