Generation mechanism of distortion aberration in a symmetric magnetic doublet for an electron beam projection system

1996 ◽  
Vol 14 (4) ◽  
pp. 2467
Author(s):  
Mamoru Nakasuji
Keyword(s):  
Electron Beam ◽  
Generation Mechanism ◽  
Projection System ◽  
Beam Projection

Scaled measurements of global space-charge induced image blur in electron beam projection system

2000 ◽  
Vol 18 (6) ◽  
pp. 2999 ◽  
Author(s):  
Liqun Han ◽  
R. Fabian Pease ◽  
W. Dan Meisburger ◽  
Gil I. Winograd ◽  
Kimitoshi Takahashi
Keyword(s):  
Electron Beam ◽  
Space Charge ◽  
Projection System ◽  
Global Space ◽  
Image Blur ◽  
Beam Projection

Stencil reticle development for electron beam projection system

1999 ◽  
Vol 17 (6) ◽  
pp. 2864 ◽  
Author(s):  
S. Kawata ◽  
N. Katakura ◽  
S. Takahashi ◽  
K. Uchikawa
Keyword(s):  
Electron Beam ◽  
Projection System ◽  
Beam Projection

Development of data conversion system for electron beam projection lithography

2002 ◽  
Vol 20 (6) ◽  
pp. 2672 ◽  
Author(s):  
Kokoro Kato ◽  
Kuninori Nishizawa ◽  
Tamae Haruki ◽  
Tadao Inoue ◽  
Koichi Kamijo ◽  
...  
Keyword(s):  
Electron Beam ◽  
Data Conversion ◽  
Projection Lithography ◽  
Conversion System ◽  
Beam Projection

scholarly journals Supershort avalanche electron beam generation in gases

2008 ◽  
Vol 26 (4) ◽  
pp. 605-617 ◽  
Author(s):  
V.F. Tarasenko ◽  
E.H. Baksht ◽  
A.G. Burachenko ◽  
I.D. Kostyrya ◽  
M.I. Lomaev ◽  
...  
Keyword(s):  
High Pressure ◽  
Electron Beam ◽  
Atmospheric Pressure ◽  
Electron Beams ◽  
Solid Angle ◽  
Generation Mechanism ◽  
Full Width ◽  
Half Maximum ◽  
Electron Beam Pulse ◽  
Supershort Avalanche Electron Beam

AbstractThis paper reports on the properties of a supershort avalanche electron beam generated in the air or other gases under atmospheric pressure and gives the analysis of a generation mechanism of supershort avalanche electron beam, as well as methods of such electron beams registration. It is reported that in the air under the pressure of 1 atm, a supershort (<100 ps) avalanche electron beam is formed in the solid angle more than 2π steradian. The electron beam has been obtained behind a 45 µm thick Al-Be foil in SF6 and Xe under the pressure of 2 atm, and in He, under the pressure of about 15 atm. It is shown that in SF6 under the high pressure (>1 atm) duration (full width at half maximum) of supershort avalanche electron beam pulse is about 150 ps.

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