Lateral tip control effects in critical dimension atomic force microscope metrology: the large tip limit

2016 ◽  
Vol 15 (1) ◽  
pp. 014003 ◽  
Author(s):  
Ronald G. Dixson ◽  
Ndubuisi G. Orji ◽  
Ryan S. Goldband
Keyword(s):  
Atomic Force Microscope ◽  
Critical Dimension ◽  
Atomic Force

Critical-Dimension Measurement using Multi-Angle-Scanning Method in Atomic Force Microscope

2006 ◽  
Vol 45 (7) ◽  
pp. 5928-5932 ◽  
Author(s):  
Ken Murayama ◽  
Satoshi Gonda ◽  
Hajime Koyanagi ◽  
Tsuneo Terasawa ◽  
Sumio Hosaka
Keyword(s):  
Atomic Force Microscope ◽  
Critical Dimension ◽  
Scanning Method ◽  
Atomic Force ◽  
Dimension Measurement

New atomic force microscope method for critical dimension metrology

2003 ◽  
Author(s):  
Takafumi Morimoto ◽  
Toru Shinaki ◽  
Yukio Kembo ◽  
Sumio Hosaka
Keyword(s):  
Atomic Force Microscope ◽  
Critical Dimension ◽  
Atomic Force

Traceable calibration of a critical dimension atomic force microscope

2011 ◽  
Author(s):  
Ronald Dixson ◽  
Ndubuisi G. Orji ◽  
Craig D. McGray ◽  
Jon Geist
Keyword(s):  
Atomic Force Microscope ◽  
Critical Dimension ◽  
Atomic Force ◽  
Traceable Calibration

Application of carbon nanotube probes in a critical dimension atomic force microscope

2007 ◽  
Author(s):  
B. C. Park ◽  
J. Choi ◽  
S. J. Ahn ◽  
D-H Kim ◽  
J. Lyou ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Atomic Force Microscope ◽  
Critical Dimension ◽  
Atomic Force
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