New phase-shifting method for high-resolution microlithography
Motoi Kido
◽
Gabor Szabo
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Joseph R. Cavallaro
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William L. Wilson, Jr.
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Frank K. Tittel
Song Zhang
◽
Yuanzheng Gong
◽
Jacob Laughner
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Qing Lou
◽
Igor R. Efimov
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...
2003 ◽
Vol 10
(5)
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pp. 456-461
Manabu Sato
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Jun Iwasaki
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Toshiaki Ohotaki
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Yukihiro Hashimoto
◽
Naohiro Tanno
2006 ◽
Vol 14
(7)
◽
pp. 2644
◽
Song Zhang
◽
Shing-Tung Yau
2013 ◽
Vol 52
(4)
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pp. 040501
◽
Xusheng Zhang
◽
Chuan He
◽
Haoyu Wang
1999 ◽
Vol 38
(28)
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pp. 5931
◽
Anand Asundi
◽
Liu Tong
◽
Chai Gin Boay
2012 ◽
Vol 45
(1)
◽
pp. 101-108
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Haihua Cui
◽
Wenhe Liao
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Ning Dai
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Xiaosheng Cheng
1995 ◽
Vol 34
(8)
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pp. 2459
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Motoharu Fujigaki
◽
Yoshiharu Morimoto
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Hiroki Toda
2003 ◽
Vol 43
(1)
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pp. 83-89
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S. Yoneyama
◽
Y. Morimoto
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T. Nomura
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M. Fujigaki
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R. Matsui
2010 ◽
Vol 18
(9)
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pp. 9684
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Song Zhang
◽
Daniel Van Der Weide
◽
James Oliver