scholarly journals New phase-shifting method for high-resolution microlithography

Author(s):  
Motoi Kido ◽  
Gabor Szabo ◽  
Joseph R. Cavallaro ◽  
William L. Wilson, Jr. ◽  
Frank K. Tittel
Author(s):  
Song Zhang ◽  
Yuanzheng Gong ◽  
Jacob Laughner ◽  
Qing Lou ◽  
Igor R. Efimov ◽  
...  

2003 ◽  
Vol 10 (5) ◽  
pp. 456-461
Author(s):  
Manabu Sato ◽  
Jun Iwasaki ◽  
Toshiaki Ohotaki ◽  
Yukihiro Hashimoto ◽  
Naohiro Tanno

2013 ◽  
Vol 52 (4) ◽  
pp. 040501 ◽  
Author(s):  
Xusheng Zhang ◽  
Chuan He ◽  
Haoyu Wang

1999 ◽  
Vol 38 (28) ◽  
pp. 5931 ◽  
Author(s):  
Anand Asundi ◽  
Liu Tong ◽  
Chai Gin Boay

Measurement ◽  
2012 ◽  
Vol 45 (1) ◽  
pp. 101-108 ◽  
Author(s):  
Haihua Cui ◽  
Wenhe Liao ◽  
Ning Dai ◽  
Xiaosheng Cheng

2003 ◽  
Vol 43 (1) ◽  
pp. 83-89 ◽  
Author(s):  
S. Yoneyama ◽  
Y. Morimoto ◽  
T. Nomura ◽  
M. Fujigaki ◽  
R. Matsui

2010 ◽  
Vol 18 (9) ◽  
pp. 9684 ◽  
Author(s):  
Song Zhang ◽  
Daniel Van Der Weide ◽  
James Oliver

Sign in / Sign up

Export Citation Format

Share Document