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Critical-dimension grazing incidence small angle x-ray scattering
Metrology, Inspection, and Process Control for Microlithography XXXII
◽
10.1117/12.2297518
◽
2018
◽
Cited By ~ 1
Author(s):
Guillaume Freychet
◽
Patrick Naulleau
◽
Ronald Pandolfi
◽
Dinesh Kumar
◽
Joe Strzalka
◽
...
Keyword(s):
Small Angle
◽
Grazing Incidence
◽
Critical Dimension
◽
X Ray
◽
X Ray Scattering
◽
Ray Scattering
Download Full-text
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Cited By
References
Using critical-dimension grazing-incidence small angle x-ray scattering to study line edge roughness (Conference Presentation)
Metrology, Inspection, and Process Control for Microlithography XXXIII
◽
10.1117/12.2514954
◽
2019
◽
Author(s):
Guillaume Freychet
◽
Dinesh Kumar
◽
Ron J. Pandolfi
◽
Isvar A. Cordova
◽
Patrick P. Naulleau
◽
...
Keyword(s):
Small Angle
◽
Grazing Incidence
◽
Critical Dimension
◽
Line Edge Roughness
◽
X Ray
◽
X Ray Scattering
◽
Edge Roughness
◽
Ray Scattering
Download Full-text
Estimation of Line Cross Sections Using Critical-Dimension Grazing-Incidence Small-Angle X-Ray Scattering
Physical Review Applied
◽
10.1103/physrevapplied.12.044026
◽
2019
◽
Vol 12
(4)
◽
Cited By ~ 1
Author(s):
Guillaume Freychet
◽
Dinesh Kumar
◽
Ron J. Pandolfi
◽
Patrick Naulleau
◽
Isvar Cordova
◽
...
Keyword(s):
Cross Sections
◽
Small Angle
◽
Grazing Incidence
◽
Critical Dimension
◽
X Ray
◽
X Ray Scattering
◽
Line Cross
◽
Ray Scattering
Download Full-text
Critical-dimension grazing-incidence small angle X-Ray scattering: applications and development (Conference Presentation)
Metrology, Inspection, and Process Control for Microlithography XXXIV
◽
10.1117/12.2552155
◽
2020
◽
Author(s):
Guillaume Freychet
◽
Dinesh Kumar
◽
Isvar A. Cordova
◽
Ron J. Pandolfi
◽
Patrick P. Naulleau
◽
...
Keyword(s):
Small Angle
◽
Grazing Incidence
◽
Critical Dimension
◽
X Ray
◽
X Ray Scattering
◽
Ray Scattering
Download Full-text
Grazing incidence small angle X-ray scattering from nanoparticles: beyond classical analysis approximations
Acta Crystallographica Section A Foundations of Crystallography
◽
10.1107/s0108767305082607
◽
2005
◽
Vol 61
(a1)
◽
pp. c411-c411
Author(s):
R. Lazzari
◽
G. Renaud
◽
F. Leroy
Keyword(s):
Small Angle
◽
Grazing Incidence
◽
Classical Analysis
◽
X Ray
◽
X Ray Scattering
◽
Ray Scattering
Download Full-text
A general model for estimating the ordering of mesoporous film by grazing incidence small angle X-ray scattering
Journal of Applied Physics
◽
10.1063/1.4875662
◽
2014
◽
Vol 115
(20)
◽
pp. 204311
◽
Cited By ~ 2
Author(s):
Nie Zhao
◽
Chunming Yang
◽
Qian Zhang
◽
Xueming Lu
◽
Yuzhu Wang
◽
...
Keyword(s):
Small Angle
◽
General Model
◽
Grazing Incidence
◽
X Ray
◽
X Ray Scattering
◽
Mesoporous Film
◽
Ray Scattering
Download Full-text
Grazing incidence small angle x-ray scattering from free-standing nanostructures
Journal of Applied Physics
◽
10.1063/1.371724
◽
1999
◽
Vol 86
(12)
◽
pp. 6763-6769
◽
Cited By ~ 153
Author(s):
Markus Rauscher
◽
Rogerio Paniago
◽
Hartmut Metzger
◽
Zoltan Kovats
◽
Jan Domke
◽
...
Keyword(s):
Small Angle
◽
Grazing Incidence
◽
Free Standing
◽
X Ray
◽
X Ray Scattering
◽
Ray Scattering
Download Full-text
Erratum: “New reactor dedicated to in operando studies of model catalysts by means of surface x-ray diffraction and grazing incidence small angle x-ray scattering” [Rev. Sci. Instrum. 78, 083902 (2007)]
Review of Scientific Instruments
◽
10.1063/1.2798532
◽
2007
◽
Vol 78
(10)
◽
pp. 109902
◽
Cited By ~ 2
Author(s):
M.-C. Saint-Lager
◽
A. Bailly
◽
P. Dolle
◽
R. Baudoing-Savois
◽
P. Taunier
◽
...
Keyword(s):
Small Angle
◽
Grazing Incidence
◽
Model Catalysts
◽
X Ray Diffraction
◽
X Ray
◽
X Ray Scattering
◽
In Operando
◽
Operando Studies
◽
Ray Scattering
Download Full-text
Thermal quenching sample chamber for grazing incidence small angle x-ray scattering studies of polymer films
Review of Scientific Instruments
◽
10.1063/1.2814023
◽
2007
◽
Vol 78
(11)
◽
pp. 113910
◽
Cited By ~ 1
Author(s):
M. A. Singh
◽
M. N. Groves
◽
M. S. Müller
◽
I. J. Stahlbrand
◽
D.-M. Smilgies
Keyword(s):
Polymer Films
◽
Small Angle
◽
Thermal Quenching
◽
Grazing Incidence
◽
X Ray
◽
X Ray Scattering
◽
Sample Chamber
◽
Ray Scattering
Download Full-text
A grazing incidence small-angle x-ray scattering analysis on capped Ge nanodots in layer structures
Journal of Physics Condensed Matter
◽
10.1088/0953-8984/22/47/474003
◽
2010
◽
Vol 22
(47)
◽
pp. 474003
◽
Cited By ~ 7
Author(s):
Hiroshi Okuda
◽
Masayuki Kato
◽
Keiji Kuno
◽
Shojiro Ochiai
◽
Noritaka Usami
◽
...
Keyword(s):
Small Angle
◽
Grazing Incidence
◽
X Ray
◽
X Ray Scattering
◽
Layer Structures
◽
Ray Scattering
Download Full-text
Ab Initio Semi-Quantitative Analysis of Micro-Beam Grazing-Incidence Small-Angle X-Ray Scattering (Μ-GISAXS) during Protein Crystal Nucleation and Growth
Journal of Proteomics & Bioinformatics
◽
10.4172/jpb.1000303
◽
2014
◽
Vol 07
(02)
◽
Cited By ~ 3
Author(s):
Claudio Nicolini
Keyword(s):
Quantitative Analysis
◽
Ab Initio
◽
Small Angle
◽
Grazing Incidence
◽
Nucleation And Growth
◽
Crystal Nucleation
◽
Protein Crystal
◽
X Ray
◽
X Ray Scattering
◽
Ray Scattering
Download Full-text
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