Optical surface error analysis and compensation technique based on Zernike polynomial coefficients

2021 ◽  
Author(s):  
Zelong Li ◽  
Chaoliang Guan ◽  
Yifan Dai ◽  
Jiahao Yong
Keyword(s):  
Error Analysis ◽  
Optical Surface ◽  
Surface Error ◽  
Zernike Polynomial ◽  
Polynomial Coefficients ◽  
Compensation Technique

The Surface Error Analysis of Theodolite Primary Mirror Considering Contact Boundary Condition

2014 ◽  
Vol 43 (12) ◽  
pp. 1212004
Author(s):  
谢军 XIE Jun ◽  
曹立华 CAO Li-hua ◽  
韩光宇 HAN Guang-yu ◽  
乔健 QIAO Jian ◽  
刘永明 LIU Yong-ming ◽  
...  
Keyword(s):  
Boundary Condition ◽  
Error Analysis ◽  
Contact Boundary ◽  
Surface Error ◽  
Primary Mirror

Random error analysis of profile measurement of large aspheric optical surface using scanning deflectometry with rotation stage

2013 ◽  
Vol 37 (3) ◽  
pp. 599-605 ◽  
Author(s):  
Muzheng Xiao ◽  
Tomohiko Takamura ◽  
Satoru Takahashi ◽  
Kiyoshi Takamasu
Keyword(s):  
Error Analysis ◽  
Random Error ◽  
Profile Measurement ◽  
Optical Surface ◽  
Rotation Stage

Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Optical Devices - Error Analysis and Pre-Experiment-

2010 ◽  
Vol 447-448 ◽  
pp. 604-608 ◽  
Author(s):  
Mu Zheng Xiao ◽  
Satomi Jujo ◽  
Satoru Takahashi ◽  
Kiyoshi Takamasu
Keyword(s):  
Error Analysis ◽  
High Surface ◽  
Measuring Method ◽  
Optical Devices ◽  
Profile Measurement ◽  
Aspheric Surface ◽  
Optical Surface ◽  
Measuring Range ◽  
Angle Difference ◽  
Flat Mirror

Large aspheric mirrors with diameter over 300 millimeters with high surface accuracy are wildly used in many areas such as astronomical telescopes. Interferometers are widely used in profile measurement of optical flat and sphere. However, standard reference aspheric surface which is necessary for this method is difficult to make. Scanning defletometry based on ESAD (Extended Shear Angle Difference) is used to measure ultra-precise large near-flat and slight curved optical surface with the accuracy of sub-nanometer. However, it is not possible for it to measure aspheric surface because of the limitation of the measuring range of autocollimators. We proposed a new measuring method to scan the surface of a large aspheric optical surface using autocollimator with rotatable optical devices fixed on linear motion stage. To eliminate the influence of the pitching error of the scanning stage, we use two mirrors reflecting laser comes from autocollimator, which have the same effect with a pentaprism used in ESAD. To enlarge the measuring range of the autocollimator, we use a rotatable mirror to fit the changes of the slope of the mirror surface under measurement. The error analysis of the method is done. Measurement of an optical flat mirror and a sphere mirror with diameter of 50 mm and biggest slope of 6000 arc-second are done. The rotatable optical devices that we designed are proved effective on eliminating the pitching error of the moving stage.

Machined surface error analysis for 5-axis machining

1996 ◽  
Vol 34 (1) ◽  
pp. 111-135 ◽  
Author(s):  
Y.-S. LE ◽  
T.-C. CHAN
Keyword(s):  
Error Analysis ◽  
Machined Surface ◽  
Surface Error
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