Ultra-precision detection of surface defects of large aperture diffraction grating based on machine vision
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2012 ◽
Vol 24
(5)
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pp. 1093-1097
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2021 ◽
Vol 1952
(2)
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pp. 022048
2015 ◽
Vol 81
(6)
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pp. 562-569
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2008 ◽
Vol 74
(5)
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pp. 498-503
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