A new technique for studying photo-acid generator chemistry and physics in polymer films using on-wafer ellipsometry and acid-sensitive dyes

2008 ◽  
Author(s):  
Cheng-Tsung Lee ◽  
Wang Yueh ◽  
Jeanette M. Roberts ◽  
Todd R. Younkin ◽  
Clifford L. Henderson
Keyword(s):  
Polymer Films ◽  
New Technique ◽  
A New Technique ◽  
Photo Acid Generator

A new technique able to measure directly the delamination of organic polymer films

1991 ◽  
Vol 32 (4) ◽  
pp. 467-470 ◽  
Author(s):  
M. Stratmann ◽  
H. Streckel ◽  
R. Feser
Keyword(s):  
Polymer Films ◽  
New Technique ◽  
Organic Polymer ◽  
A New Technique

A new technique to quantify oxygen diffusion in polymer films

1992 ◽  
Vol 25 (19) ◽  
pp. 4962-4966 ◽  
Author(s):  
Yuanping Gao ◽  
Peter R. Ogilby
Keyword(s):  
Polymer Films ◽  
Oxygen Diffusion ◽  
New Technique ◽  
A New Technique
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