Preliminary design of a two-dimensional electron beam position monitor system for multiple-electron-beam-direct-write lithography

2009 ◽  
Author(s):  
Sheng-Yung Chen ◽  
Kuen-Yu Tsai ◽  
Hoi-Tou Ng ◽  
Chi-Hsiang Fan ◽  
Ting-Hang Pei ◽  
...  
Keyword(s):  
Electron Beam ◽  
Preliminary Design ◽  
Monitor System ◽  
Direct Write ◽  
Two Dimensional ◽  
Beam Position Monitor ◽  
Dimensional Electron ◽  
Beam Position

scholarly journals Beam-position monitor system for the KEKB injector linac

1998 ◽  
Author(s):  
T. Suwada ◽  
N. Kamikubota ◽  
K. Furukawa ◽  
H. Kobayashi
Keyword(s):  
Monitor System ◽  
Beam Position Monitor ◽  
Beam Position

scholarly journals A machine protection beam position monitor system

1998 ◽  
Author(s):  
E. Medvedko ◽  
S. Smith ◽  
A. Fisher
Keyword(s):  
Monitor System ◽  
Beam Position Monitor ◽  
Beam Position

EPICS interface to Libera electron beam position monitor

2008 ◽  
Vol 19 (2) ◽  
pp. 65-69 ◽  
Author(s):  
Y YAN ◽  
Y LENG ◽  
D LIU ◽  
Y CHEN ◽  
C YIN
Keyword(s):  
Electron Beam ◽  
Beam Position Monitor ◽  
Beam Position
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