A very high Q-factor inductor using MEMS technology

2010 ◽  
Author(s):  
N. Khalid ◽  
K. Shah ◽  
J. Singh ◽  
H. P. Le ◽  
J. Devlin ◽  
...  
Keyword(s):  
Q Factor ◽  
High Q ◽  
Mems Technology ◽  
Very High

High Q Circular-Section Solenoid-Type Inductor

2008 ◽  
Author(s):  
Xiuhan Li ◽  
Guanghua Shu ◽  
Jinan Sao ◽  
Xiongwei Zhang
Keyword(s):  
Flip Chip ◽  
Micro Electro Mechanical System ◽  
The Self ◽  
Cmos Process ◽  
Structure Parameters ◽  
Q Factor ◽  
Circular Section ◽  
High Q ◽  
Ansoft Hfss ◽  
Mems Technology

A* high Q-factor circular-section solenoid-type inductor is designed and fabricated through micro electro mechanical system (MEMS) technology. The radius of the circular-section is 100μm. Ansoft HFSS is used to design and optimize the structure parameters of the inductor. The stable inductance of 10nH and maximum Q-factor of 46 is gained at the N of 10, wire width w of 10μm, space between wires d of 15μm and the self-resonance frequency of the inductor is above 10GHz. A novel fabrication method—flip chip bonding is proposed to bond the two parts of the inductor, and the process is compatible with CMOS process.

scholarly journals Deformed microcavities with very high Q-factors and directional farfield emission

2020 ◽  
Vol 238 ◽  
pp. 01006
Author(s):  
Arne Behrens ◽  
Martí Bosch ◽  
Martina Hentschel ◽  
Stefan Sinzinger
Keyword(s):  
Surface Roughness ◽  
State Of The Art ◽  
Whispering Gallery Mode ◽  
Q Factor ◽  
Tapered Fiber ◽  
High Q ◽  
Whispering Gallery ◽  
Q Factors ◽  
Very High

We report the design and optimized fabrication of deformed whispering gallery mode resonators in silica with solely ICP-RIE. This allows us to control the morphology of the resonators more freely and results in low surface roughness. The light was coupled into the resonator using a state of the art tapered fiber approach and we determined the Q-factor in the range of 105

Very high Q-factor resonators in monocrystalline silicon

1990 ◽  
Vol 21 (1-3) ◽  
pp. 323-327 ◽  
Author(s):  
R.A. Buser ◽  
N.F. De Rooij
Keyword(s):  
Monocrystalline Silicon ◽  
Q Factor ◽  
High Q ◽  
Very High

Very High Q-Factor Bandpass Filter Using Additive Manufacturing

2021 ◽  
Author(s):  
Enrique Lopez-Oliver ◽  
Cristiano Tomassoni ◽  
Giuseppe Addamo ◽  
Flaviana Calignano ◽  
Mauro Lumia ◽  
...  
Keyword(s):  
Additive Manufacturing ◽  
Bandpass Filter ◽  
Q Factor ◽  
High Q ◽  
Very High

Very High Q-Factor Based On G-Shaped Resonator Type Metamaterial Absorber

2018 ◽  
pp. 160 ◽  
Author(s):  
Khalid Saeed Lateef Al-Badri
Keyword(s):  
Resonance Frequency ◽  
Metamaterial Absorber ◽  
Q Factor ◽  
High Q ◽  
Image Sensing ◽  
At Resonance ◽  
Band Filter ◽  
Simulation Results ◽  
Very High ◽  
Triple Band

High Q-factor based on absorption can be achieved by tuning (the reflection and the transition percentage). In this work, the simple design and simulated in S-band have been investigated. The simulation results of G-shape resonator are shown triple band of absorption peaks 60%, 91.5%, and 70.3%) at resonance frequency 2.7 GHz, 3.26 GHz, and 4.05 GHz respectively. The results exhibited very high of the Q-factor ( 271 ) at resonance frequency ( 3.26 GHz ).  The high Q-factor can be used to enhance the sensor sensing, narrowband band filter and  image sensing.

Sign in / Sign up

Export Citation Format

Share Document