In this paper we report on the development tungsten oxide based chemiresistive sensors for the monitoring of oxygen at low temperatures (T ≤ 400 °C) in dry and humid air. The sensors were deposited onto alumina substrate by a combination of spin coating and a photolithographic process to define the sensing area. Our results show that the sensors comply with a linear relationship over a 0 to 20% concentration range, with a high response towards oxygen. The highest response was observed at 350 °C (ΔR/Ra = 7.8) in humid and in dry air (ΔR/Ra = 18). This result is a significant improvement over our previous experiments and we believe to take the concept of a metal-oxide based oxygen sensor a step closer.
Tungsten Oxide Based Sensor for Oxygen Detection