Structure and thermal properties of heterometallic complexes for chemical vapor deposition of Cu–Pd films

2017 ◽  
Vol 58 (8) ◽  
pp. 1522-1529 ◽  
Author(s):  
V. V. Krisyuk ◽  
S. Urkasym kyzy ◽  
I. A. Baidina ◽  
G. V. Romanenko ◽  
I. V. Korolkov ◽  
...  
Keyword(s):  
Thermal Properties ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Heterometallic Complexes

Structure and thermal properties of heterometallic complexes for chemical vapor deposition of Cu—Pd films

2017 ◽  
Vol 58 (8) ◽  
pp. 1573-1580
Author(s):  
V. V. Krisyuk ◽  
◽  
S. Urkasym kyzy ◽  
I. A. Baidina ◽  
G. V. Romanenko ◽  
...  
Keyword(s):  
Thermal Properties ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Heterometallic Complexes

Oxygen Doping Effects on Thermal Properties of ZrF4-BaF2Glasses Synthesized by Plasma-Enhanced Chemical Vapor Deposition

1991 ◽  
Vol 30 (Part 2, No. 12B) ◽  
pp. L2113-L2115 ◽  
Author(s):  
Kazuo Fujiura ◽  
Yoshiki Nishida ◽  
Kenji Kobayashi ◽  
Shiro Takahashi
Keyword(s):  
Thermal Properties ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Oxygen Doping ◽  
Doping Effects

Volatile trinuclear heterometallic beta-diketonates: Structure and thermal properties related to the chemical vapor deposition of composite thin films

Polyhedron ◽  
2020 ◽  
Vol 191 ◽  
pp. 114806
Author(s):  
Vladislav V. Krisyuk ◽  
Samara Urkasym kyzy ◽  
Tatyana V. Rybalova ◽  
Ilya V. Korolkov ◽  
Sergey V. Sysoev ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Properties ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Composite Thin Films

Thermal Properties of Various Ta Precursors Used in Chemical Vapor Deposition of Tantalum Pentoxide

1994 ◽  
Vol 33 (Part 1, No. 11) ◽  
pp. 6291-6298 ◽  
Author(s):  
Hiroyuki Koyama ◽  
Satoshi Tanimoto ◽  
Koichi Kuroiwa ◽  
Yasuo Tarui
Keyword(s):  
Thermal Properties ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Tantalum Pentoxide
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