Reactive Deposition of Al2O3 Coatings by Thermal Evaporation in a High-Current Discharge with a Hollow Anode
2020 ◽
Vol 14
(1)
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pp. 85-91
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2007 ◽
Vol 73
(6)
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pp. 682-687
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2020 ◽
Vol 167
(14)
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pp. 140549
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2016 ◽
pp. 5-10
2009 ◽
Vol 373
(12-13)
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pp. 1165-1169
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2014 ◽
Vol 41
(10)
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pp. 275-279