Optical one-dimensional waveguides in oxyfluoride glass fabricated by Helium Ion implantation

In this work, a one-dimensional waveguide is formed by virtue of the helium ion implantation in the oxyfluoride glass (OFG). The energy and the fluence of the ion implantation are 0.4 MeV and [Formula: see text] [Formula: see text], respectively. The m-line curve with the effective refractive indices of the modes was recorded by using the prism coupling system. The energy loss distribution and the refractive index profile were calculated by the stopping and range of ions into matter (SRIM)-2013 and the RCM, respectively. The light modal profile was measured by the end-facet coupling system. It suggests that the He[Formula: see text]-ion implanted OFG waveguides have the potential to act as integrated photonic devices.