FORMULA FOR MAXIMUM SECONDARY ELECTRON YIELD FROM METALS

2015 ◽  
Vol 22 (02) ◽  
pp. 1550019 ◽  
Author(s):  
AI-GEN XIE ◽  
LING WANG ◽  
LIU-HUA MU

Based on free-electron model, the calculated inelastic mean escape depth of secondary electrons, experimental one, the energy band of metal, the characteristics and processes of secondary electron emission, maximum number of secondary electrons released per primary electron δ(Φ,EF)PEm as a function of parameter Km, work function Φ and Fermi energy EF was deduced, where Km is a constant for a given metal in the energy range 100–800 eV. According to the relationship between maximum secondary electron yield from metal δ(Φ,EF)m and δ(Φ,EF)PEm, the formula for δ(Φ,EF)m as a function of atomic number Z, parameter Km, Φ and EF was deduced. Using the deduced formula for δ(Φ,EF)m, Z, experimental δ(Φ,EF)m, Φ and EF, Km relative to alkali metals, Km relative to earth-alkali metals and the mean value of Km were computed, respectively. And the formulae for maximum secondary electron yield from alkali metals, earth-alkali metals and metals were obtained and proved to be true, respectively. On the basis of the deduced formula for δ(Φ,EF)m and the empirical relation that high Φ are connected with high EF, it can be concluded that high δ(Φ,EF)m are connected with high Φ and vice versa.

2019 ◽  
Vol 26 (04) ◽  
pp. 1850181 ◽  
Author(s):  
AI-GEN XIE ◽  
YANG YU ◽  
YA-YI CHEN ◽  
YU-QING XIA ◽  
HAO-YU LIU

Based on primary range [Formula: see text], relationships among parameters of secondary electron yield [Formula: see text] and the processes and characteristics of secondary electron emission (SEE) from negative electron affinity (NEA) semiconductors, the universal formulas for [Formula: see text] at [Formula: see text] and at [Formula: see text] for NEA semiconductors were deduced, respectively; where [Formula: see text] is incident energy of primary electron. According to the characteristics of SEE from NEA semiconductors with [Formula: see text], [Formula: see text], deduced universal formulas for [Formula: see text] at [Formula: see text] and at [Formula: see text] for NEA semiconductors and experimental data, special formulas for [Formula: see text] at 0.5[Formula: see text] of several NEA semiconductors with [Formula: see text] were deduced and proved to be true experimentally, respectively; where [Formula: see text] is the [Formula: see text] at which [Formula: see text] reaches maximum secondary electron yield. It can be concluded that the formula for [Formula: see text] of NEA semiconductors with [Formula: see text] was deduced and could be used to calculate [Formula: see text], and that the method of calculating the 1/[Formula: see text] of NEA semiconductors with [Formula: see text] is plausible; where [Formula: see text] is the probability that an internal secondary electron escapes into vacuum upon reaching the surface of emitter, and 1/[Formula: see text] is mean escape depth of secondary electron.


2016 ◽  
Vol 23 (05) ◽  
pp. 1650039 ◽  
Author(s):  
AI-GEN XIE ◽  
HAN-SUP UHM ◽  
YUN-YUN CHEN ◽  
EUN-HA CHOI

On the basis of the free-electron model, the energy range of internal secondary electrons, the energy band of a metal, the formula for inelastic mean escape depth, the processes and characteristics of secondary electron emission, the probability of internal secondary electrons reaching surface and passing over the surface barrier into vacuum B as a function of original work function [Formula: see text] and the distance from Fermi energy to the bottom of the conduction band [Formula: see text] was deduced. According to the characteristics of creation of an excited electron, the definition of average energy required to produce an internal secondary electron [Formula: see text], the energy range of excited electrons and internal secondary electrons and the energy band of a metal, the formula for expressing [Formula: see text] using the number of valence electron of the atom V, [Formula: see text] and atomic number Z was obtained. Based on the processes and characteristics of secondary electron emission, several relationships among the parameters of the secondary electron emission and the deduced formulae for B and [Formula: see text], the formula for expressing maximum secondary electron yield of metals [Formula: see text] using Z, V, back-scattering coefficient r, incident energy of primary electron at which secondary electron yield reaches [Formula: see text], [Formula: see text] and [Formula: see text] was deduced and demonstrated to be true. According to the deduced formula for [Formula: see text] and the relationships among [Formula: see text] and several parameters of secondary electron emitter, it can be concluded that high [Formula: see text] values are linked to high V, Z and [Formula: see text] values, and vice versa. Based on the processes and characteristics of secondary electron emission and the deduced formulae for the B, [Formula: see text] and [Formula: see text], the influences of surface properties on [Formula: see text] were discussed.


2013 ◽  
Vol 27 (32) ◽  
pp. 1350238 ◽  
Author(s):  
AI-GEN XIE ◽  
QING-FANG LI ◽  
YUN-YUN CHEN ◽  
HONG-YAN WU

Based on the formula for the average energy required to produce an internal secondary electron (ε) in emitter, the energy band of insulator and the assumption that the maximum exit energy of secondary electron in insulator is reverse to the width of forbidden band, the formula for ε in insulator is deduced. On the basis of the formula for the number of internal secondary electrons produced in the direction of the velocity of primary electrons per unit path length, the energy band of insulator and the characteristic of secondary electron emission, the formula for the probability of secondary electrons passing over the surface barrier of insulator into the vacuum (B) is also deduced. According to some relationship between the parameters of secondary electron yield from insulator, the formula for the mean escape depth (1/α) is successfully deduced. The formulae for ε and 1/α are experimentally proven, respectively, and thereafter the formula for B is indirectly proven to be true by the experimental results. It is concluded that the formulae for ε, B and 1/α are universal to estimate ε, B and 1/α under the condition that primary electrons from 10 keV to 30 keV hit on an insulator, respectively.


2017 ◽  
Vol 31 (10) ◽  
pp. 1750105 ◽  
Author(s):  
Ai-Gen Xie ◽  
Kun Zhon ◽  
De-Lin Zhao ◽  
Yu-Qing Xia

Based on the characteristics of secondary electron emission and the relationships among parameters of secondary electron yield [Formula: see text] in the low-energy range of [Formula: see text] eV (low-energy [Formula: see text]), the universal formula for low-energy [Formula: see text] as a function of [Formula: see text], [Formula: see text] and maximum [Formula: see text] was deduced, where [Formula: see text] and [Formula: see text] are the incident energies of primary electron and of [Formula: see text], respectively. From the deduced universal formula and experimental low-energy [Formula: see text] from metals, semiconductors and insulators, special formula for low-energy [Formula: see text] from metals as a function of [Formula: see text], [Formula: see text] and [Formula: see text] and that for low-energy [Formula: see text] from semiconductors and insulators as a function of [Formula: see text], [Formula: see text] and [Formula: see text] were deduced, respectively. The results were analyzed, it can be concluded that the two deduced special formulae can be used to calculate low-energy [Formula: see text] from metals, semiconductors and insulators, respectively.


Author(s):  
John C. Russ

Monte-Carlo programs are well recognized for their ability to model electron beam interactions with samples, and to incorporate boundary conditions such as compositional or surface variations which are difficult to handle analytically. This success has been especially powerful for modelling X-ray emission and the backscattering of high energy electrons. Secondary electron emission has proven to be somewhat more difficult, since the diffusion of the generated secondaries to the surface is strongly geometry dependent, and requires analytical calculations as well as material parameters. Modelling of secondary electron yield within a Monte-Carlo framework has been done using multiple scattering programs, but is not readily adapted to the moderately complex geometries associated with samples such as microelectronic devices, etc.This paper reports results using a different approach in which simplifying assumptions are made to permit direct and easy estimation of the secondary electron signal from samples of arbitrary complexity. The single-scattering program which performs the basic Monte-Carlo simulation (and is also used for backscattered electron and EBIC simulation) allows multiple regions to be defined within the sample, each with boundaries formed by a polygon of any number of sides. Each region may be given any elemental composition in atomic percent. In addition to the regions comprising the primary structure of the sample, a series of thin regions are defined along the surface(s) in which the total energy loss of the primary electrons is summed. This energy loss is assumed to be proportional to the generated secondary electron signal which would be emitted from the sample. The only adjustable variable is the thickness of the region, which plays the same role as the mean free path of the secondary electrons in an analytical calculation. This is treated as an empirical factor, similar in many respects to the λ and ε parameters in the Joy model.


1966 ◽  
Vol 10 ◽  
pp. 447-461 ◽  
Author(s):  
J. W. Colby ◽  
W. N. Wise ◽  
D. K. Conley

AbstractIn the microprobe analyzer, a portion of the high energy electrons impinging on the surface are backscattered from the sample and re-emitted at high energy levels. Low energy (less than 50 eV) or secondary electrons also ate emitted. Both the electron backscatter yield and the secondary electron yield are related to the mean atomic number of the target material and, hence, may be used to provide information about the target composition. Unfortunately, however, the secondary electron yield is very sensitive to the surface condition of the specimen and various instrument parameters. This complicates the otherwise simple linear relationship between sample composition and electron backscatter yield.It is shown that the effects due to secondary electrons can be minimized by biasing the sample, and that good results can be obtained in the analysis of binary systems. The limitations and utility of the method are discussed, and backscatter yields are determined.


1999 ◽  
Vol 5 (S2) ◽  
pp. 282-283
Author(s):  
B.L. Thiel ◽  
D.J. Stokes ◽  
D. Phifer

We have measured the secondary electron yield curve for liquid water using an Environmental SEM. The secondary electron emission coefficient, measured as a function of incident electron energy, is important for interpreting contrast in hydrated biological and inorganic specimens. This information is even more critical for water than other materials, as it is a factor of prime importance in understanding radiation damage in biological tissues.[1]These measurements were taken using a Philips XL-30 field emission ,ESEM, and repeated on an Electroscan E3 ESEM, equipped with a CeB6 filament. A specially designed Faraday cup was fashioned from brass and fitted with a removable graphite cup having an inset for a platinum aperture. This assembly was placed into an electrically floating Peltier cooling stage, and connected to a KE Instruments probe current meter.


1975 ◽  
Vol 30 (8) ◽  
pp. 981-985
Author(s):  
H. P. Beck ◽  
R. Langkau

Abstract The backward emission of secondary electrons from thick targets of graphite, aluminum, copper, molybdenum and tantalum under the impact of protons, deuterons, 3 He-ions and a-particles has been measured for incident energies in the MeV-range. The data are discussed within the scope of theoretical considerations based on low-energy studies taking into account the contribution due to ;< 5-rays.


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