Solid-Phase Reactions of Diffusion Barriers of Ti and TiN to Copper Layers onSiO2
1996 ◽
Vol 35
(Part 1, No. 7)
◽
pp. 4027-4033
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2020 ◽
Vol 84
(9)
◽
pp. 1165-1168
Keyword(s):
1997 ◽
Vol 8
(2)
◽
pp. 129-136
◽
Keyword(s):