Combination of Electron or Laser Beam Irradiation with High Vacuum Chemical Vapor Deposition (HV-CVD) of Al2O3 for in-situ Local Structuring on Wafer Scale Substrate
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1991 ◽
Vol 6
(9)
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pp. 1913-1918
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Efficient optimization of high vacuum chemical vapor deposition of niobium oxide on full wafer scale
2010 ◽
Vol 8
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pp. 012026
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1995 ◽
Vol 53
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pp. 256-257
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1993 ◽
Vol 140
(12)
◽
pp. 3588-3590
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