Microwave Plasma-Assisted Diamond Film Deposition

Author(s):  
Jes Asmussen ◽  
Timothy Grotjohn
1990 ◽  
Vol 39 (10) ◽  
pp. 1635
Author(s):  
SONG RU-AN ◽  
CHENG XIAN-AN ◽  
ZHOU ZHONG-YI

2011 ◽  
Vol 20 (3) ◽  
pp. 374-379 ◽  
Author(s):  
X.J. Li ◽  
W.Z. Tang ◽  
F.Y. Wang ◽  
C.M. Li ◽  
L.F. Hei ◽  
...  

1999 ◽  
Vol 594 ◽  
Author(s):  
Marc D. Fries ◽  
Yogesh K. Vohra

AbstractThe cobalt chrome alloy Co-28Cr-6Mo is widely used in human joint replacement applications. These joints are highly sensitive to wear and are usually replaced after approximately ten years of use. In order to extend these implants' service lifetimes, a thin film of diamond may be applied to the implant wear surfaces by microwave plasma chemical vapor deposition (MPCVD) following MPCVD nitridation. Diamond films often delaminate from cobalt chrome due to a high thermal expansion mismatch. Additionally, under most conditions diamond films degrade into graphite by dissolution of nuclei into solvents like Co and Cr. By nitriding the cobalt chrome through MPCVD prior to diamond deposition, a usable diamond film may be achieved. It may be possible to merge both the nitriding and deposition steps into a single process, since both nitridation and deposition will be performed by MPCVD. In addition, controlled amounts of nitrogen in hydrogen/methane plasma under CVD conditions result in a nanostructured diamond coating. We have investigated the formation of both micro- and nanocrystalline diamond formation on cobalt chrome.


2007 ◽  
Vol 16 (4-7) ◽  
pp. 675-678 ◽  
Author(s):  
Haiyang Zhou ◽  
Jun Watanabe ◽  
Masato Miyake ◽  
Akihisa Ogino ◽  
Masaaki Nagatsu ◽  
...  

2011 ◽  
Vol 117-119 ◽  
pp. 1310-1314
Author(s):  
Xing Rui Li ◽  
Xin Wei Shi ◽  
Ning Yao ◽  
Xin Chang Wang

Nano-crystalline diamond (NCD) films with good adhesion were deposited on flexible copper substrate with Ni interlayer by Microwave Plasma Chemical Vapor Deposition (MPCVD). In this paper, two-stage method was used to improve the adhesion between the copper substrates and the diamond films. The effect of deposition time of the first stage on the morphology, crystal structure, non-diamond phase and adhesive properties of diamond films was investigated. The performance and structure of the diamond films were studied by Scanning Electron Microscope (SEM), Raman Spectroscopy (Raman) and X-Ray Diffraction (XRD). The results showed that the films were nano-crystalline diamond films positively. Impress method was used to examine the adhesion between diamond film and the substrate. When deposition time is 1.5h, the adhesion between diamond film and the copper substrate is better than the others. When it was 2.5h or longer, because the graphite layers existed as intermediate, the adherence between the diamond films and copper substrates was very poor. Therefore, the diamond films were easily peeled off from the substrates. Otherwise, the second stage called annealing process after the deposition played an important role to the adhesion. The films would be easily peeled off by curling without the annealing process.


2002 ◽  
Vol 11 (3-6) ◽  
pp. 562-566 ◽  
Author(s):  
M. Nagatsu ◽  
M. Makino ◽  
M. Tanga ◽  
H. Sugai

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