A Novel Fault Detection Scheme Based on Difference in Independent Component for Reliable Process Monitoring: Application on the Semiconductor Manufacturing Processes

2020 ◽  
Vol 53 (7) ◽  
pp. 313-320
Author(s):  
Cheng Zhang ◽  
Tao Xu ◽  
Yuan Li
Author(s):  
Rui-Cheng Zhang ◽  
Yu-Ting Li ◽  
Wei-Zheng Liang ◽  
Wei Xiong

Aiming at the problems of inaccurate fault detection and error alarm in the process of hot strip mill process, a fault detection scheme of canonical independent component analysis is proposed. The new scheme first uses canonical variable analysis to calculate the canonical variable matrix of observation data, which effectively solves the problem of autocorrelation and cross-correlation. Then the canonical variable matrix is decomposed by independent component analysis to obtain independent elements. Finally, the data are monitored online through constructing statistics. It is proved that the accuracy of the scheme for identifying fault data is reached to 100%, and the misjudgment rate data are reduced to less than 0.6% through the simulation study of the hot strip mill process data.


Processes ◽  
2020 ◽  
Vol 8 (9) ◽  
pp. 1079
Author(s):  
Nanxi Li ◽  
Hongbo Shi ◽  
Bing Song ◽  
Yang Tao

Data-based process monitoring methods have received tremendous attention in recent years, and modern industrial process data often exhibit dynamic and nonlinear characteristics. Traditional autoencoders, such as stacked denoising autoencoders (SDAEs), have excellent nonlinear feature extraction capabilities, but they ignore the dynamic correlation between sample data. Feature extraction based on manifold learning using spatial or temporal neighbors has been widely used in dynamic process monitoring in recent years, but most of them use linear features and do not take into account the complex nonlinearities of industrial processes. Therefore, a fault detection scheme based on temporal-spatial neighborhood enhanced sparse autoencoder is proposed in this paper. Firstly, it selects the temporal neighborhood and spatial neighborhood of the sample at the current time within the time window with a certain length, the spatial similarity and time serial correlation are used for weighted reconstruction, and the reconstruction combines the current sample as the input of the sparse stack autoencoder (SSAE) to extract the correlation features between the current sample and the neighborhood information. Two statistics are constructed for fault detection. Considering that both types of neighborhood information contain spatial-temporal structural features, Bayesian fusion strategy is used to integrate the two parts of the detection results. Finally, the superiority of the method in this paper is illustrated by a numerical example and the Tennessee Eastman process.


2018 ◽  
Vol 2018 ◽  
pp. 1-14 ◽  
Author(s):  
Xiangshun Li ◽  
Di Wei ◽  
Cheng Lei ◽  
Zhiang Li ◽  
Wenlin Wang

Independent Component Analysis (ICA), a type of typical data-driven fault detection techniques, has been widely applied for monitoring industrial processes. FastICA is a classical algorithm of ICA, which extracts independent components by using the Newton iteration method. However, the choice of the initial iterative point of Newton iteration method is difficult; sometimes, selection of different initial iterative points tends to show completely different effects for fault detection. So far, there is still no good strategy to get an ideal initial iterative point for ICA. To solve this problem, a modified ICA algorithm based on biogeography-based optimization (BBO) called BBO-ICA is proposed for the purpose of multivariate statistical process monitoring. The Newton iteration method is replaced with BBO here for extracting independent components. BBO is a novel and effective optimization method to search extremes or maximums. Comparing with the traditional intelligent optimization algorithm of particle swarm optimization (PSO) and so on, BBO behaves with stronger capability and accuracy of searching for solution space. Moreover, numerical simulations are finished with the platform of DAMADICS. Results demonstrate the practicability and effectiveness of BBO-ICA. The proposed BBO-ICA shows better performance of process monitoring than FastICA and PSO-ICA for DAMADICS.


2015 ◽  
Vol 28 (3) ◽  
pp. 297-305 ◽  
Author(s):  
Manish Ranjit ◽  
Harshvardhan Gazula ◽  
Simon M. Hsiang ◽  
Yang Yu ◽  
Marcus Borhani ◽  
...  

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