Sub-diffraction-limited multilayer coatings for the 03 numerical aperture micro-exposure tool for extreme ultraviolet lithography
1999 ◽
Vol 17
(6)
◽
pp. 2992
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1996 ◽
Vol 35
(Part 1, No. 12B)
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pp. 6475-6479
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2016 ◽
Vol 8
(9)
◽
pp. 729-733
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