Fabrication of Photonic Crystal Line Defect Waveguides by Use of Optical Lithography and Focused Ion Beam

ABSTRACTThis work deals with SU-8 waveguides and waveguide structures fabricated on an oxidized silicon substrate using ‘Focused ion beam (FIB) lithography’. From our experimentation it seems that FIB method is practically not suitable for fabricating long SU-8 waveguide structures, rather it is more suitable for nanoscale modification of already fabricated waveguides, such as, to fabricate photonic crystal structures.

Download Full-text

Fabrication of photonic crystal structures by focused ion beam etching

Proceedings of 2004 6th International Conference on Transparent Optical Networks (IEEE Cat. No.04EX804) ◽

10.1109/icton.2004.1361987 ◽

2004 ◽

Author(s):

M. Hill ◽

M. Cryan ◽

N. Lim ◽

R. Varrazza ◽

P. Heard ◽

...

Keyword(s):

Photonic Crystal ◽

Crystal Structures ◽

Focused Ion Beam ◽

Ion Beam ◽

Ion Beam Etching

Download Full-text

Photonic crystal structures with ultrahigh aspect ratio in lithium niobate fabricated by focused ion beam milling

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.3557027 ◽

2011 ◽

Vol 29 (2) ◽

pp. 021205 ◽

Cited By ~ 31

Author(s):

Guangyuan Si ◽

Aaron J. Danner ◽

Siew Lang Teo ◽

Ee Jin Teo ◽

Jinghua Teng ◽

...

Keyword(s):

Photonic Crystal ◽

Aspect Ratio ◽

Lithium Niobate ◽

Crystal Structures ◽

Focused Ion Beam ◽

Ion Beam ◽

Focused Ion Beam Milling

Download Full-text

Y-TYPE PHOTONIC CRYSTAL WAVEGUIDE WITH MINIMUM BRANCHES SPACE

International Journal of Nanoscience ◽

10.1142/s0219581x0600508x ◽

2006 ◽

Vol 05 (06) ◽

pp. 743-746

Author(s):

SHOUZHEN HAN ◽

JIE TIAN ◽

CHENG REN ◽

XINGSHENG XU ◽

ZHIYUAN LE ◽

...

Keyword(s):

Photonic Crystal ◽

Integrated Circuits ◽

Focused Ion Beam ◽

Near Infrared ◽

Ion Beam ◽

Infrared Region ◽

Photonic Crystal Waveguide ◽

Ion Beam Etching ◽

Optical Integrated Circuits ◽

All Optical

The abstract should summarize the context, content and conclusions of the paper in less than 200 words. We fabricated a two-dimensional Y-branch photonic crystal waveguide in the near infrared region by using focused ion beam etching and depositing system. The light guide characters of the waveguide were measured for three different spaces between branches. Field intensity distributions of TE polarized wave in the branches were simulated by using the transfer matrix method. Both the theoretical and experimental results show that the shortest space between branches of the photonic crystal waveguide is about 1.4 times wavelength of transmitted light. If the space became shorter, the light in the two branches would couple to each other seriously. This result might be helpful for the design of compact wave demultiplexer and all-optical integrated circuits.

Download Full-text