Investigation of a Linear Plasma Ion Source for the Deposition of Diamond-Line Carbon Thin Films

2018 ◽  
Author(s):  
Craig Outten
Keyword(s):  
Thin Films ◽  
Ion Source ◽  
Carbon Thin Films ◽  
Plasma Ion Source ◽  
Linear Plasma

Nucleation and Early Growth of Sputtered thin Films

1970 ◽  
Vol 28 ◽  
pp. 516-517
Author(s):  
Dudley M. Sherman ◽  
Thos. E. Hutchinson
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Ion Beam ◽  
Ion Source ◽  
Water Cooling ◽  
Stages Of Growth ◽  
Lens Assembly ◽  
Microscope Technique ◽  
Ion Beam Sputter Deposition

The in situ electron microscope technique has been shown to be a powerful method for investigating the nucleation and growth of thin films formed by vacuum vapor deposition. The nucleation and early stages of growth of metal deposits formed by ion beam sputter-deposition are now being studied by the in situ technique.A duoplasmatron ion source and lens assembly has been attached to one side of the universal chamber of an RCA EMU-4 microscope and a sputtering target inserted into the chamber from the opposite side. The material to be deposited, in disc form, is bonded to the end of an electrically isolated copper rod that has provisions for target water cooling. The ion beam is normal to the microscope electron beam and the target is placed adjacent to the electron beam above the specimen hot stage, as shown in Figure 1.

Electron energy loss spectroscopy of diamond-like carbon thin films

1992 ◽  
Vol 50 (2) ◽  
pp. 1272-1273
Author(s):  
J. Kulik ◽  
Y. Lifshitz ◽  
G.D. Lempert ◽  
S. Rotter ◽  
J.W. Rabalais ◽  
...  
Keyword(s):  
Thin Films ◽  
Energy Loss ◽  
Electron Energy ◽  
Ion Beam ◽  
Diamond Like Carbon ◽  
Ion Beam Deposition ◽  
Chemistry Research ◽  
Carbon Thin Films ◽  
Electron Energy Loss ◽  
Beam Deposition

Carbon thin films with diamond-like properties have generated significant interest in condensed matter science in recent years. Their extreme hardness combined with insulating electronic characteristics and high thermal conductivity make them attractive for a variety of uses including abrasion resistant coatings and applications in electronic devices. Understanding the growth and structure of such films is therefore of technological interest as well as a goal of basic physics and chemistry research. Recent investigations have demonstrated the usefulness of energetic ion beam deposition in the preparation of such films. We have begun an electron microscopy investigation into the microstructure and electron energy loss spectra of diamond like carbon thin films prepared by energetic ion beam deposition.The carbon films were deposited using the MEIRA ion beam facility at the Soreq Nuclear Research Center in Yavne, Israel. Mass selected C+ beams in the range 50 to 300 eV were directed onto Si {100} which had been etched with HF prior to deposition.

Electron-diffraction studies of amorphous carbon thin films

1993 ◽  
Vol 51 ◽  
pp. 1100-1101
Author(s):  
David A. Muller
Keyword(s):  
Thin Films ◽  
Electron Diffraction ◽  
Amorphous Carbon ◽  
Glassy Carbon ◽  
Spherical Structure ◽  
Local Ordering ◽  
Carbon Arc ◽  
Similar Appearance ◽  
Carbon Thin Films ◽  
Large Spherical

The sp2 rich amorphous carbons have a wide variety of microstructures ranging from flat sheetlike structures such as glassy carbon to highly curved materials having similar local ordering to the fullerenes. These differences are most apparent in the region of the graphite (0002) reflection of the energy filtered diffracted intensity obtained from these materials (Fig. 1). All these materials consist mainly of threefold coordinated atoms. This accounts for their similar appearance above 0.8 Å-1. The fullerene curves (b,c) show a string of peaks at distance scales corresponding to the packing of the large spherical and oblate molecules. The beam damaged C60 (c) shows an evolution to the sp2 amorphous carbons as the spherical structure is destroyed although the (220) reflection in fee fcc at 0.2 Å-1 does not disappear completely. This 0.2 Å-1 peak is present in the 1960 data of Kakinoki et. al. who grew films in a carbon arc under conditions similar to those needed to form fullerene rich soots.

Application of Capillary Discharge Technique for Deposition of Diamond-Like Carbon Thin Films (2nd Report)

2013 ◽  
Vol 133 (5) ◽  
pp. 293-299
Author(s):  
Kiyotoshi Fujii ◽  
Etsuo Fujiwara ◽  
Masayoshi Shimizu ◽  
Shozo Inoue
Keyword(s):  
Thin Films ◽  
Capillary Discharge ◽  
Diamond Like Carbon ◽  
Carbon Thin Films

Interface tailoring for adhesion enhancement of diamond-like carbon thin films

2012 ◽  
Vol 25 ◽  
pp. 8-12 ◽  
Author(s):  
M.C. Salvadori ◽  
F.S. Teixeira ◽  
W.W.R. Araújo ◽  
L.G. Sgubin ◽  
I.G. Brown
Keyword(s):  
Thin Films ◽  
Diamond Like Carbon ◽  
Carbon Thin Films

Atomic hydrogen interactions with amorphous carbon thin films

2009 ◽  
Vol 106 (7) ◽  
pp. 073305 ◽  
Author(s):  
Bhavin N. Jariwala ◽  
Cristian V. Ciobanu ◽  
Sumit Agarwal
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Atomic Hydrogen ◽  
Carbon Thin Films

Temperature dependence of the mechanical properties of tetrahedrally coordinated amorphous carbon thin films

2005 ◽  
Vol 87 (16) ◽  
pp. 161915 ◽  
Author(s):  
David A. Czaplewski ◽  
J. P. Sullivan ◽  
T. A. Friedmann ◽  
J. R. Wendt
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Temperature Dependence ◽  
Amorphous Carbon ◽  
Carbon Thin Films
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