scholarly journals Characterization of Pulsed High-Current Generator for Extreme Ultraviolet Generation

2007 ◽  
Vol 127 (3) ◽  
pp. 151-155 ◽  
Author(s):  
Nobuaki Oshima ◽  
Syouichi Inokuchi ◽  
Toru Kimura ◽  
Weihua Jiang ◽  
Kiyoshi Yatsui ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
High Current ◽  
Current Generator

A Compact High Current Generator for X-Ray Radiography

2005 ◽  
Author(s):  
B.M. Kovalchuk ◽  
A.V. Kharlov ◽  
V.B. Zorin
Keyword(s):  
High Current ◽  
Current Generator ◽  
X Ray

Fabrication and characterization of high-current-density carbon-nanotube cold cathodes

2005 ◽  
Vol 251 (1-4) ◽  
pp. 249-253 ◽  
Author(s):  
Chunhui Zhu ◽  
Chaogang Lou ◽  
Wei Lei ◽  
Xiaobing Zhang
Keyword(s):  
Carbon Nanotube ◽  
Current Density ◽  
High Current Density ◽  
High Current ◽  
Cold Cathodes ◽  
Fabrication And Characterization

At-wavelength, system-level flare characterization of extreme-ultraviolet optical systems

2000 ◽  
Vol 39 (17) ◽  
pp. 2941 ◽  
Author(s):  
Patrick Naulleau ◽  
Kenneth A. Goldberg ◽  
Eric M. Gullikson ◽  
Jeffrey Bokor
Keyword(s):  
Extreme Ultraviolet ◽  
System Level ◽  
Optical Systems

Characterization of out-of-band radiation and plasma parameters in laser-produced Sn plasmas for extreme ultraviolet lithography light sources

2008 ◽  
Vol 104 (1) ◽  
pp. 013305 ◽  
Author(s):  
S. Namba ◽  
S. Fujioka ◽  
H. Sakaguchi ◽  
H. Nishimura ◽  
Y. Yasuda ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Light Sources ◽  
Extreme Ultraviolet Lithography ◽  
Plasma Parameters ◽  
Ultraviolet Lithography

scholarly journals Direct spectrotemporal characterization of femtosecond extreme-ultraviolet pulses

2013 ◽  
Vol 88 (3) ◽  
Author(s):  
David Gauthier ◽  
Benoît Mahieu ◽  
Giovanni De Ninno
Keyword(s):  
Extreme Ultraviolet

scholarly journals Characterization of high-current pulsed arcs ranging from 100–250 kA peak

2019 ◽  
Vol 52 (18) ◽  
pp. 185203 ◽  
Author(s):  
R Sousa Martins ◽  
C Zaepffel ◽  
L Chemartin ◽  
Ph Lalande ◽  
F Lago
Keyword(s):  
High Current
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