Wafer Bonding for Soi

1987 ◽  
Vol 107 ◽  
Author(s):  
W.P. Maszara ◽  
G. Goetz ◽  
T. Caviglia ◽  
A. Cserhati ◽  
G. Johnson ◽  
...  
Keyword(s):  
Surface Energy ◽  
Room Temperature ◽  
Bonding Temperature ◽  
Silicon Layer ◽  
Inert Atmosphere ◽  
Mos Capacitors ◽  
Face To Face ◽  
Interface Charge ◽  
20 Nm ◽  
Good Agreement

AbstractBonding of 3 and 4 in. oxidized silicon wafers was investigated for SOI applications. The bonding was achieved by using a surface treatment procedure compatible with VLSI processing and by heating in an inert atmosphere a pair of wafers which had been contacted face-to-face. A quantitative method for the evaluation of the surface energy of the bond based on crack propagation was developed. The bond strength was found to increase with the bonding temperature from about 60-85 erg/cm2 at room temperature to ⋍2200 erg/cm2 at 1405°C, in good agreement with the surface energy of bulk quartz. The strength was essentially independent of the bond time for up to 1100°C. Electrical properties of the wet-oxide-to-wet-oxide bond were tested using MOS capacitors. The results were consistent with a negative interface charge density of approximately 1011cm−2 at the bond. A double etch-back procedure was used to thin the device wafer to the desired thickness within *20 nm across a 3in. wafer. The density of threading dislocations in the remaining silicon layer was smaller than 103 cm−3, and the residual dopant concentration less than 5×l015cm−3, both remnants of the etchstop layer. A discussion of the bonding mechanism will be presented.

Dislocation structures around SiO2 Particles in aged Cu-Cr-SiO2

1978 ◽  
Vol 36 (1) ◽  
pp. 594-595
Author(s):  
N.J. Long ◽  
M.H. Loretto ◽  
C.H. Lloyd
Keyword(s):  
Flow Stress ◽  
Single Crystals ◽  
Room Temperature ◽  
Thin Foil ◽  
Age Hardening ◽  
Dispersion Strengthening ◽  
Accurate Picture ◽  
The Matrix ◽  
Very High ◽  
Good Agreement

IntroductionThere have been several t.e.m. studies (1,2,3,4) of the dislocation arrangements in the matrix and around the particles in dispersion strengthened single crystals deformed in single slip. Good agreement has been obtained in general between the observed structures and the various theories for the flow stress and work hardening of this class of alloy. There has been though some difficulty in obtaining an accurate picture of these arrangements in the case when the obstacles are large (of the order of several 1000's Å). This is due to both the physical loss of dislocations from the thin foil in its preparation and to rearrangement of the structure on unloading and standing at room temperature under the influence of the very high localised stresses in the vicinity of the particles (2,3).This contribution presents part of a study of the Cu-Cr-SiO2 system where age hardening from the Cu-Cr and dispersion strengthening from Cu-Sio2 is combined.

scholarly journals Spine Examination during COVID-19 Pandemic via Video Consultation

2021 ◽  
Author(s):  
Tom Jansen ◽  
Martin Gathen ◽  
Amadeo Touet ◽  
Hans Goost ◽  
Dieter Christian Wirtz ◽  
...  
Keyword(s):  
Pain Intensity ◽  
Range Of Motion ◽  
Test Results ◽  
Risk Of Infection ◽  
Face To Face ◽  
Reliable Tool ◽  
Provocation Tests ◽  
Active Range Of Motion ◽  
Video Consultation ◽  
Good Agreement

Abstract Introduction During the current COVID-19 pandemic video consultations are increasingly common in order to minimize the risk of infection for staff and patients. The aim of this study was to evaluate the feasibility of a spine examination via video. Methods A total of 43 patients were recruited. Each participant underwent a video-based (VB) and a conventional face-to-face (FTF) spine examination. Pain intensity, active range of motion, inspection, a neurophysiologic basic exam and provocations tests were evaluated using video-based and face-to-face methods. Results The intra-rater reliability (IRR) was measured between both examinations. Good to very good IRR values were obtained in inspection (Kappa between 0,752 und 0,944), active range of motion and basic neurophysiological examination (Kappa between 0,659 und 0,969). Only moderate matches were found in specific provocation tests (Kappa between 0,407 und 0,938). A video-based spine examination is a reliable tool for measuring pain intensity, active range of motion and a basic neurophysiologic exam. Conclusion A basic spine examination during a video consultation is possible. A good agreement of the test results between video-based and face-to-face examination could be found.

Defect Structure of MEV Si Implantation in GaAs

1988 ◽  
Vol 126 ◽  
Author(s):  
S.-Tong Lee ◽  
G. Braunstein ◽  
Samuel Chen
Keyword(s):  
Free Surface ◽  
Defect Structure ◽  
Room Temperature ◽  
Surface Region ◽  
Peak Position ◽  
Lattice Disorder ◽  
Depth Profiles ◽  
Trim Calculation ◽  
Good Agreement

ABSTRACTThe defect and atomic profiles for MeV implantation of Si in GaAs were investigated using He++ channeling, TEM, and SIMS. Doses of 1–10 × 1015Si/cm2 at 1–3 MeV were used. MeV implantation at room temperature rendered only a small amount of lattice disorder in GaAs. Upon annealing at 400°C for 1 h or 800°C for 30 a, we observed a ‘defect-free’ surface region (- 1 μ for 3 MeV implant). Below this region, extensive secondary defects were formed in a band which was 0.7 μ wide and centered at 2 μ for 3 MeV implant. These defects were mostly dislocations lying in the [111] plane. SIMS depth profiles of Si implants showed the Si peak to be very close to the peak position of the defects. The experimental profiles of Si were compared to the TRIM calculation; generally good agreement existed among the peak positions.

Analysis of Thermal Variation of Length and Refractive Index of Lead Fluoride to Study its Optical Properties

1989 ◽  
Vol 172 ◽  
Author(s):  
T. S. Aurora ◽  
D. O. Pederson ◽  
S. M. Day
Keyword(s):  
Refractive Index ◽  
Room Temperature ◽  
Linear Thermal Expansion ◽  
Small Variation ◽  
Published Data ◽  
Thermal Variation ◽  
Lead Fluoride ◽  
Superionic Phase Transition ◽  
Lorenz Relation ◽  
Good Agreement

AbstractLinear thermal expansion and refractive index variation have been measured in lead fluoride with a laser interferometer as a function of temperature. Data has been analyzed using the Lorentz-Lorenz relation. Molecular polarizability, band gap, variation of refractive index with density, and strain-polarizability parameter have been studied as a function of temperature. They exhibit a small variation with temperature except near the superionic phase transition where the variation appears to be more pronounced. The results are in good agreement with the published data near room temperature.

ATOMIC FORCE MICROSCOPY AND XRD ANALYSIS OF SILVER FILMS DEPOSITED BY THERMAL EVAPORATION

2006 ◽  
Vol 20 (02) ◽  
pp. 217-231 ◽  
Author(s):  
MUHAMMAD MAQBOOL ◽  
TAHIRZEB KHAN
Keyword(s):  
Atomic Force Microscopy ◽  
Grain Size ◽  
Surface Characterization ◽  
Room Temperature ◽  
Thermal Evaporation ◽  
Xrd Analysis ◽  
Force Microscopy ◽  
Atomic Force ◽  
Average Grain Size ◽  
20 Nm

Thin films of pure silver were deposited on glass substrate by thermal evaporation process at room temperature. Surface characterization of the films was performed using X-ray diffraction (XRD) and atomic force microscopy (AFM). Thickness of the films varied between 20 nm and 72.8 nm. XRD analysis provided a sharp peak at 38.75° from silver. These results indicated that the films deposited on glass substrates at room temperature are crystalline. Three-dimension and top view pictures of the films were obtained by AFM to study the grain size and its dependency on various factors. Average grain size increased with the thickness of the deposited films. A minimum grain size of 8 nm was obtained for 20 nm thick films, reaching 41.9 nm when the film size reaches 60 nm. Grain size was calculated from the information provided by the XRD spectrum and averaging method. We could not find any sequential variation in the grain size with the growth rate.

The Study of Surface Energy, Electrical Properties and Platelet Adhesion Behavior of a-C/a-CN Films Synthesized by PIII-D

2007 ◽  
Vol 330-332 ◽  
pp. 573-576
Author(s):  
Feng Wen ◽  
Nan Huang ◽  
Hong Sun ◽  
An Sha Zhao ◽  
Jin Wang ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Surface Energy ◽  
Room Temperature ◽  
Platelet Adhesion ◽  
Laser Source ◽  
Adhesion Behavior ◽  
Hall Effects ◽  
Type Semiconductor ◽  
Plasma Immersion Ion Implantation ◽  
Deposited Films

Amorphous carbon (a-C) and carbon nitrogen (a-CN) films were synthesized using plasma immersion ion implantation and deposition (PIII-D) under different N2 flow at room temperature (R.T.). Lifshitz-van der Waals/acid-base approach (LW-AB) was introduced in order to study films’ surface energy deeply. The results showed that the capability of the surface of the film on receive electron changed with N2 flow, which effected platelet adhesion of film strongly. Hall effects tests were employed to characterize the electrical properties of the films. The results showed that the as-deposited films exhibited n-type semiconductor characteristic, and carrier concentration of the films decreased with N2 flow increasing. Raman spectra with 514nm laser-source were employed to analyze the structural of the films.

A Facile Fynthesis of ZnS Nanostructures via Liquid-Solid Reactions

2014 ◽  
Vol 979 ◽  
pp. 184-187
Author(s):  
Weerachon Phoohinkong ◽  
Thitinat Sukonket ◽  
Udomsak Kitthawee
Keyword(s):  
Electron Microscopy ◽  
Room Temperature ◽  
Inorganic Salts ◽  
Chloride Salt ◽  
X Ray ◽  
Commercial Grade ◽  
Transmission Electron ◽  
Salt Addition ◽  
20 Nm ◽  
Scanning Electron

Zinc sulfide (ZnS) nanostructures are important materials for many technologies such as sensors, infrared windows, transistors, LED displays, and solar cells. However, many methods of synthesizing ZnS nanostructures are complex and require expensive equipment. In this study, a liquid-solid chemical reaction without surfactant was used to synthesize ZnS at room temperature. In addition, commercial grade zinc oxide (ZnO) particles were used as a precursor. The effect of the addition of acids and inorganic salts were investigated. The products were characterized by field emission scanning electron microscopy (FESEM) coupled with energy-dispersive X-ray spectroscopy (EDX), and transmission electron microscopy (TEM). The results show that the nanoparticles of ZnS were obtained in hydrochloric acid and acetic acid addition. The diameters were in the range of 10 to 20 nm and 50 to 100 nm, respectively. In the case of a sodium chloride salt addition, a ZnS structure was obtained with a particle size of approximately 5 nm and a flake-like morphology.

Experimental Verification of Constitutive Equations for Creep and Plasticity Based on Overlay Models

1983 ◽  
Vol 105 (3) ◽  
pp. 277-284 ◽  
Author(s):  
P. Meijers ◽  
F. Roode
Keyword(s):  
Plastic Deformation ◽  
Room Temperature ◽  
304 Stainless Steel ◽  
Model Parameters ◽  
General Description ◽  
Time Effects ◽  
Plastic Deformations ◽  
Biaxial Load ◽  
Theoretical Predictions ◽  
Good Agreement

A general description of creep and plastic deformation based on overlay models is presented. This includes the description of time effects during plastic deformation at room temperature. A detailed procedure to obtain the model parameters is also discussed. The description has been evaluated for a large number of uniaxial and biaxial load histories on thin walled tubes. The materials involved are a 2 1/4 Cr-1 Mo steel stabilized with Niobium (WN 1.6770) and a 304 stainless steel (WN 1.4948). The theoretical predictions of the plastic deformations are found to be sufficiently accurate. The evaluation of the phenomenological description for creep shows a fairly good agreement with the real creep deformation process. Special attention requires the description of softening due to microstructural changes.

scholarly journals Organic acids as cloud condensation nuclei: Laboratory studies of highly soluble and insoluble species

2003 ◽  
Vol 3 (1) ◽  
pp. 949-982 ◽  
Author(s):  
P. Pradeep Kumar ◽  
K. Broekhuizen ◽  
J. P. D. Abbatt
Keyword(s):  
Organic Acids ◽  
Room Temperature ◽  
Cloud Condensation Nuclei ◽  
Particle Diameter ◽  
Diffusion Chamber ◽  
Laboratory Studies ◽  
Condensation Nuclei ◽  
Gradient Diffusion ◽  
Kohler Theory ◽  
Good Agreement

Abstract. The ability of sub-micron-sized organic acid particles to act as cloud condensation nuclei (CCN) has been examined at room temperature using a newly constructed continuous-flow, thermal-gradient diffusion chamber (TGDC). The organic acids studied were: oxalic, malonic, glutaric, oleic and stearic. The CCN properties of the highly soluble acids – oxalic, malonic and glutaric – match very closely Kohler theory predictions which assume full dissolution of the dry particle and a surface tension of the growing droplet equal to that of water. In particular, for supersaturations between 0.3 and 0.6, agreement between the dry particle diameter which gives 50% activation and that calculated from Kohler theory is to within 3 nm on average. In the course of the experiments, considerable instability of glutaric acid particles was observed as a function of time and there is evidence that they fragment to some degree to smaller particles. Stearic acid and oleic acid, which are both highly insoluble in water, did not activate at supersaturations of 0.6% with dry diameters up to 140 nm. Finally, to validate the performance of the TGDC, we present results for the activation of ammonium sulfate particles that demonstrate good agreement with Kohler theory if solution non-ideality is considered. Our findings support earlier studies in the literature that showed highly soluble organics to be CCN active but insoluble species to be largely inactive.

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