Iron Redistribution in Aluminum Thin Films
Keyword(s):
AbstractStrongly non uniform Fe depth distributions have been observed in AI(0.13 at% Fe) thin films deposited at temperatures of 350ºC and above. The concentration of Fe is uniform in depth at a deposition temperature of 300ºC but is increasingly enhanced toward the substrate interface at 450ºC. Subsequent annealing produces only a slight redistribution of Fe. The Fe is primarily present as precipitates smaller than 100 nm. A model of grain boundary diffusion of Fe and precipitate formation and grain growth is proposed to explain the observed behavior.
2006 ◽
Vol 54
(15)
◽
pp. 4053-4061
◽
1998 ◽
Vol 38
(12)
◽
pp. 1857-1861
◽
2011 ◽
Vol 59
(10)
◽
pp. 3937-3945
◽
Keyword(s):
Keyword(s):
1975 ◽
Vol 36
(C4)
◽
pp. C4-191-C4-199
◽
Keyword(s):