Improved optical loss characteristics of PECVD silicon oxynitride films using low frequency plasma

2005 ◽  
Vol 862 ◽  
Author(s):  
S. Naskara ◽  
C.A. Bower ◽  
S.D. Wolter ◽  
B.R. Stonera ◽  
J.T. Glass
Keyword(s):  
Refractive Index ◽  
Plasma Frequency ◽  
Low Frequency ◽  
Optical Loss ◽  
Power Input ◽  
Growth Conditions ◽  
Silicon Oxynitride ◽  
Elastic Recoil ◽  
Elastic Recoil Detection ◽  
Detection Analysis

AbstractWith the continued growth of photonics, silicon oxynitride (SiOxNy) is becoming a popular material for optoelectronic applications owing to its large tunable refractive index. However, with the increase in refractive index, these films tend to show poor optical transmission characteristics. In this research we have investigated the influence of growth conditions on the loss characteristics of PECVD SiOxNy films. The films are grown at 350 °C substrate temperature and 1 Torr pressure with silane (SiH4) and nitrous oxide (N2O) precursor gases. The precursor flow rate and power input to the system are varied as the two primary parameters. It is observed that films grown at 100 kHz plasma frequency proved to be more transmissive than films grown at 13.56 MHz plasma frequency. Elastic recoil detection analysis results showed the hydrogen content is less in the low frequency films than the high frequency films, which is believed to be the reason for the low loss behavior. The details of these analysis results are discussed below.

Yttrium Oxyhydrides for Photochromic Applications: Correlating Composition and Optical Response

2018 ◽  
Author(s):  
Dmitrii Moldarev ◽  
Elbruz M. Baba ◽  
Marcos V. Moro ◽  
Chang C. You ◽  
Smagul Zh. Karazhanov ◽  
...  
Keyword(s):  
Medical Devices ◽  
Ternary Diagram ◽  
Optical And Electrical Properties ◽  
Ambient Conditions ◽  
Elastic Recoil ◽  
Elastic Recoil Detection Analysis ◽  
Photochromic Properties ◽  
Smart Windows ◽  
Elastic Recoil Detection ◽  
Detection Analysis

It has been recently demonstrated that yttrium oxyhydride(YHO) films can exhibit reversible photochromic properties when exposed to illumination at ambient conditions. This switchable optical propertyenables their utilization in many technological applications, such as smart windows, sensors, goggles, medical devices, etc. However, how the composition of the films affects their optical properties is not fully clear and therefore demands a straightforward investigation. In this work, the composition of YHO films manufactured by reactive magnetron sputtering under different conditions is deduced in a ternary diagram from Time-of-Flight Elastic Recoil Detection Analysis (ToF-ERDA). The results suggest that stable compounds are formed with a specificchemical formula – YH<sub>2-δ</sub>O<sub>δ</sub>. In addition, optical and electrical properties of the films are investigated, and a correlation with their compositions is established. The corresponding photochromic response is found in a specific oxygen concentration range (0.45 < δ < 1.5) with maximum and minimum of magnitude on the lower and higher border, respectively.

scholarly journals Elastic Recoil Detection Analysis of Hydrogen content in diamonds

2021 ◽  
Author(s):  
Hélène Bureau ◽  
Hicham Khodja ◽  
Imène Estève ◽  
Matthieu Charrondière-Lewis ◽  
Eloise Gaillou ◽  
...  
Keyword(s):  
Hydrogen Content ◽  
Elastic Recoil ◽  
Elastic Recoil Detection Analysis ◽  
Elastic Recoil Detection ◽  
Detection Analysis
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