This article reviews to enrich the variety of microelectromechanical systems (MEMS) to open new applications and markets. Established manufacturing methods for most MEMS were developed for electronics, and so the microcromachines turned out that way generally look like chips. The selection of materials is usually limited, and height, measured in microns, often remains in the single digits and rarely exceeds 20. Work at the University of Wisconsin in Madison is proceeding with a process that uses deep X-ray lithography. The technique is derived from an established micromanufacturing process known as LIGA, an acronym derived from the German terms for lithography, electroforming, and molding. LIGA, which has been around for a while, produces relatively tall micromachines by a method that radiates X-ray-sensitive materials to create molds. EFAB is being developed by USC’s Information Sciences Institute with funding from the Defense Advanced Research Projects Agency. To support commercialization of the process, the Institute has established the EFAB Consortium, which intends to give interested partners the option of acquiring prototype micro devices fabricated from their own 3D CAD designs.
Feature Focus: Skyscrapers in a Microworld