scholarly journals Characterization of piezoelectric AlN thin films deposited on Si by RF reactive magnetron sputtering at low temperature for acoustic wave devices

2004 ◽  
Author(s):  
Akhtar Mirfazli
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Acoustic Wave ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Acoustic Wave Devices

Growth and characterization of NiO thin films prepared by dc reactive magnetron sputtering

2011 ◽  
Vol 13 (2) ◽  
pp. 314-320 ◽  
Author(s):  
A. Mallikarjuna Reddy ◽  
A. Sivasankar Reddy ◽  
Kee-Sun Lee ◽  
P. Sreedhara Reddy
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering

scholarly journals Synthesis and characterization of single-phase epitaxial Cr2N thin films by reactive magnetron sputtering

2018 ◽  
Vol 54 (2) ◽  
pp. 1434-1442 ◽  
Author(s):  
M. A. Gharavi ◽  
G. Greczynski ◽  
F. Eriksson ◽  
J. Lu ◽  
B. Balke ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Single Phase ◽  
Reactive Magnetron Sputtering ◽  
Synthesis And Characterization ◽  
Reactive Magnetron

Structural and mechanical characterization of BCxNy thin films deposited by pulsed reactive magnetron sputtering

2009 ◽  
Vol 518 (1) ◽  
pp. 77-83 ◽  
Author(s):  
Matthias Krause ◽  
Laurent Bedel ◽  
Anthony Taupeau ◽  
Ulrich Kreissig ◽  
Frans Munnik ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Mechanical Characterization ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron

Surface characterization of TiO2 thin films obtained by high-energy reactive magnetron sputtering

2008 ◽  
Vol 254 (14) ◽  
pp. 4396-4400 ◽  
Author(s):  
R. Wasielewski ◽  
J. Domaradzki ◽  
D. Wojcieszak ◽  
D. Kaczmarek ◽  
A. Borkowska ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Surface Characterization ◽  
High Energy ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Tio2 Thin Films

Characterization of inhomogeneity in TiO2 thin films prepared by pulsed dc reactive magnetron sputtering

2011 ◽  
Vol 520 (1) ◽  
pp. 272-279 ◽  
Author(s):  
M. Horprathum ◽  
P. Eiamchai ◽  
P. Chindaudom ◽  
N. Nuntawong ◽  
V. Patthanasettakul ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Tio2 Thin Films ◽  
Pulsed Dc ◽  
Dc Reactive Magnetron Sputtering
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