Field effect passivation of plasma oxidized SiOx layer on boron emitter surface by PECVD
Keyword(s):
1987 ◽
Vol 48
(8)
◽
pp. 1251-1254
◽
Keyword(s):
1981 ◽
Vol 42
(C4)
◽
pp. C4-503-C4-506
Keyword(s):
1981 ◽
Vol 42
(C4)
◽
pp. C4-423-C4-432
◽
Keyword(s):
1984 ◽
Vol 45
(C9)
◽
pp. C9-185-C9-190
◽
1992 ◽
Vol 1
(Part_2)
◽
pp. 309-319
Keyword(s):
2004 ◽
Vol 9
(2)
◽
pp. 129-138
2019 ◽
Vol 139
(3)
◽
pp. 207-210