Parameters of Sensitive Element of Capacitive Micromechanical Accelerometer with Sandwich Construction
2019 ◽
Vol 24
(3)
◽
pp. 257-266
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2018 ◽
Vol 23
(6)
◽
pp. 625-629
2020 ◽
Vol 25
(2)
◽
pp. 155-166
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2020 ◽
Keyword(s):
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