scholarly journals Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid

Micromachines ◽  
2021 ◽  
Vol 12 (6) ◽  
pp. 645
Author(s):  
Hao Jia ◽  
Pengcheng Xu ◽  
Xinxin Li
Keyword(s):  
Chemical Sensor ◽  
Nanoelectromechanical Systems ◽  
Molecular Binding ◽  
Mass Sensors ◽  
Sensing Applications ◽  
Liquid Phases ◽  
Viscous Media ◽  
On Chip ◽  
Q Factors ◽  
Resonant Mass Sensors

Resonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated excitation and readout components, exhibit exquisite gravimetric sensitivities which have greatly advanced the bio/chemical sensor technologies in the past two decades. This paper reviews the development of integrated MEMS/NEMS resonators for bio/chemical sensing applications mainly in air and liquid. Different vibrational modes (bending, torsional, in-plane, and extensional modes) have been exploited to enhance the quality (Q) factors and mass sensing performance in viscous media. Such resonant mass sensors have shown great potential in detecting many kinds of trace analytes in gas and liquid phases, such as chemical vapors, volatile organic compounds, pollutant gases, bacteria, biomarkers, and DNA. The integrated MEMS/NEMS mass sensors will continuously push the detection limit of trace bio/chemical molecules and bring a better understanding of gas/nanomaterial interaction and molecular binding mechanisms.

Ultra-High Frequency (UHF) Nanomechanical Resonator Integrated With Phase Locked Loop

2004 ◽  
Author(s):  
X. L. Feng ◽  
Y. T. Tang ◽  
C. Callegari ◽  
M. L. Roukes
Keyword(s):  
Phase Locked Loop ◽  
Small Mass ◽  
Low Noise ◽  
Nanoelectromechanical Systems ◽  
Nanomechanical Resonator ◽  
Practical Applications ◽  
Mass Sensors ◽  
Resonant Mass Sensors ◽  
And Control ◽  
Quality Factor Q

Nanoelectromechanical systems (NEMS) are interesting for both probing nanoscale physical fundamentals and exploring new technological applications [1]. In particular, nanomechanical resonators possess superb attributes including surprisingly-high operating frequency, ultra-small mass, high quality factor (Q), and thus are promising candidates for components in novel signal processing systems and ultra-sensitive sensors [1,2]. NEMS resonators with fundamental resonant frequencies exceeding 1GHz have been realized [3] and unprecedented mass sensitivity has also been demonstrated with VHF high-Q NEMS resonant mass sensors [2,4]. Among many engineering challenges to boost NEMS to more practical applications, it is of great importance to develop the generic protocol of integrating NEMS resonators with feedback and control systems. This work presents the first implementation of the integration of a UHF NEMS resonator with a low-noise phase locked loop (PLL).

Parametrically Excited Electrostatic MEMS Cantilever Beam With Flexible Support

2016 ◽  
Vol 139 (2) ◽  
Author(s):  
Mark Pallay ◽  
Shahrzad Towfighian
Keyword(s):  
Cantilever Beam ◽  
Large Amplitude ◽  
Chaotic Behavior ◽  
Signal To Noise Ratio ◽  
Mass Sensors ◽  
Flexible Support ◽  
Sensing Applications ◽  
Electrostatic Mems ◽  
Fringe Fields ◽  
Steady State Amplitude

Parametric resonators that show large amplitude of vibration are highly desired for sensing applications. In this paper, a microelectromechanical system (MEMS) parametric resonator with a flexible support that uses electrostatic fringe fields to achieve resonance is introduced. The resonator shows a 50% increase in amplitude and a 50% decrease in threshold voltage compared with a fixed support cantilever model. The use of electrostatic fringe fields eliminates the risk of pull-in and allows for high amplitudes of vibration. We studied the effect of decreasing boundary stiffness on steady-state amplitude and found that below a threshold chaotic behavior can occur, which was verified by the information dimension of 0.59 and Poincaré maps. Hence, to achieve a large amplitude parametric resonator, the boundary stiffness should be decreased but should not go below a threshold when the chaotic response will appear. The resonator described in this paper uses a crab-leg spring attached to a cantilever beam to allow for both translation and rotation at the support. The presented study is useful in the design of mass sensors using parametric resonance (PR) to achieve large amplitude and signal-to-noise ratio.

scholarly journals Opto-Mechanical Photonic Crystal Cavities for Sensing Application

2020 ◽  
Vol 10 (20) ◽  
pp. 7080
Author(s):  
Ji Xia ◽  
Qifeng Qiao ◽  
Guangcan Zhou ◽  
Fook Siong Chau ◽  
Guangya Zhou
Keyword(s):  
Photonic Crystal ◽  
Light Propagation ◽  
Mass Force ◽  
Mechanical Interaction ◽  
Quality Factors ◽  
Photonic Crystal Cavities ◽  
New Class ◽  
Experimental Systems ◽  
Sensing Applications ◽  
On Chip

A new class of hybrid systems that couple optical and mechanical nanoscale devices is under development. According to their interaction concepts, two groups of opto-mechanical systems are summarized as mechanically tunable and radiation pressure-driven optical resonators. On account of their high-quality factors and small mode volumes as well as good on-chip integrability with waveguides/circuits, photonic crystal (PhC) cavities have attracted great attention in sensing applications. Benefitting from the opto-mechanical interaction, a PhC cavity integrated opto-mechanical system provides an attractive platform for ultrasensitive sensors to detect displacement, mass, force, and acceleration. In this review, we introduce basic physical concepts of opto-mechanical PhC system and describe typical experimental systems for sensing applications. Opto-mechanical interaction-based PhC cavities offer unprecedented opportunities to develop lab-on-a-chip devices and witness a promising prospect to further manipulate light propagation in the nanophotonics.

scholarly journals Recent Advances in ASIC Development for Enhanced Performance M-Sequence UWB Systems

Sensors ◽  
2020 ◽  
Vol 20 (17) ◽  
pp. 4812 ◽  
Author(s):  
Pavol Galajda ◽  
Martin Pecovsky ◽  
Miroslav Sokol ◽  
Martin Kmec ◽  
Dusan Kocur
Keyword(s):  
Integrated Circuit ◽  
Short Range ◽  
Functional System ◽  
Ultra Wideband ◽  
Radar Sensors ◽  
Sensing Applications ◽  
Radio Detection ◽  
M Sequence ◽  
Application Specific Integrated Circuit ◽  
On Chip

Short-range ultra-wideband (UWB) radar sensors belong to very promising sensing techniques that have received vast attention recently. The M-sequence UWB sensing techniques for radio detection and ranging feature several advantages over the other short-range radars, inter alia superior integration capabilities. The prerequisite to investigate their capabilities in real scenarios is the existence of physically available hardware, i.e., particular functional system blocks. In this paper, we present three novel blocks of M-sequence UWB radars exploiting application-specific integrated circuit (ASIC) technology. These are the integrated 15th-order M-sequence radar transceiver on one chip, experimental active Electronic Communication Committee (ECC) bandpass filter, and miniature transmitting UWB antenna with an integrated amplifier. All these are custom designs intended for the enhancement of capabilities of an M-sequence-based system family for new UWB short-range sensing applications. The design approaches and verification of the manufactured prototypes by measurements of the realized circuits are presented in this paper. The fine balance on technology capabilities (Fc of roughly 120 GHz) and thoughtful design process of the proposed blocks is the first step toward remarkably minimized devices, e.g., as System on Chip designs, which apparently allow broadening the range of new applications.

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