Non-destructive depth profile evaluation of multi-layer thin film stack using simultaneous analysis of data from multiple X-ray photoelectron spectroscopy instruments

2022 ◽  
Author(s):  
Yutaka Hoshina ◽  
Kazuya Tokuda ◽  
Yoshihiro SAITO ◽  
Yugo Kubo ◽  
Junji Iihara
Keyword(s):  
Thin Film ◽  
Data Analysis ◽  
Depth Profile ◽  
Photoelectron Spectroscopy ◽  
Simultaneous Analysis ◽  
Analysis Tool ◽  
X Ray ◽  
Depth Profiles ◽  
Layer Thin Film ◽  
Non Destructive

Abstract Non-destructive depth profile evaluation of multi-layer thin film stacks using simultaneous analysis of angle-resolved x-ray photoelectron spectroscopy data from multiple instruments is demonstrated. The data analysis algorithm, called the maximum smoothness method, was originally designed to handle data from a single XPS instrument with a single x-ray energy; in this work, the algorithm is extended to provide a simultaneous analysis tool which can handle data from multiple instruments with multiple x-ray energies. The analysis provides depth profiles for multilayer stacks that cannot be obtained by conventional data analysis methods. In this paper, metal multi-layer stack samples with total thickness greater than 10 nm are analyzed with the maximum smoothness method to nondestructively obtain depth profiles, with precise information on the chemical states of atoms in the surface layer (< 2 nm) and the overall layer stack structure, which can only be obtained by analyzing the data from multiple instruments.

scholarly journals Montecarlo Simulation and HAXPES Analysis of Organosilane Segregation in Titania Xerogel Films; Towards a Generic Surface Chemofunctionalization Process

Surfaces ◽  
2020 ◽  
Vol 3 (3) ◽  
pp. 352-365
Author(s):  
Javier Mateo Moreno ◽  
Rodrigo Calvo Membibre ◽  
Sergio Pinilla Yanguas ◽  
Juan Rubio Zuazo ◽  
Miguel Manso Siván
Keyword(s):  
Photoelectron Spectroscopy ◽  
Surface Segregation ◽  
Titanium Isopropoxide ◽  
Condensation Process ◽  
X Ray ◽  
Depth Profiles ◽  
Partial Charges ◽  
Xerogel Films ◽  
Non Destructive

The formation of xerogels implies a sequence of hydrolysis and condensation reactions, which are intricate to analyze in heteromolecular sols. We analyze by probabilistic Montecarlo methods the development of hybrid organosilane–titania xerogels and illustrate how partial charges of the reacting molecules can help estimating relative probabilities for the condensation of the molecules. Since the condensation rate of Ti alkoxides is much higher than the corresponding rate of Si alkoxides (especially if bearing a non-hydrolizable group), by imposing a fast condensation process in agreement with low pH kinetics, the process leads to a surface segregation of the organosilane. The simulation results are compared with results of characterization of thin condensates of two different organosilanes within a titanium–isopropoxide matrix. Non-destructive in-depth profiles were obtained by hard x-ray photoelectron spectroscopy, which can resolve through estimation of Si and specific moieties of the organosilane molecules the progress of the condensation. These results are relevant for the generalization of chemo-functionalization processes by kinetic demixing of organosilanes, which have myriad applications in biomedicine and biotechnology.

Basic Studies of Multi-Layer Thin Film Analysis Using Fundamental Parameter Method

1989 ◽  
Vol 33 ◽  
pp. 213-223
Author(s):  
Y. Kataoka ◽  
T. Arai
Keyword(s):  
Thin Film ◽  
Fluorescence Analysis ◽  
Parameter Method ◽  
Fundamental Parameter ◽  
X Ray ◽  
Basic Studies ◽  
Layer Thin Film ◽  
Non Destructive ◽  
Fundamental Parameter Method

X-ray fluorescence analysis is the most suitable method, for the characterization of the thickness and the chemical composition of thin film samples. It is non-destructive, rapid, precise, and accurate for both metal and oxide samples.

Depth Profiling of Cu(In,Ga)Se2 by Grazing Incidence X-ray Diffraction

2003 ◽  
Vol 763 ◽  
Author(s):  
I.M. Kötschau ◽  
G. Bilger ◽  
H.W. Schock
Keyword(s):  
Thin Film ◽  
Depth Profile ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Grazing Incidence ◽  
Strong Impact ◽  
X Ray Diffraction ◽  
Typical Application ◽  
X Ray ◽  
Depth Profiles

AbstractGrazing incidence X-ray diffraction (GIXRD) in conjunction with a layer absorption modeling algorithm is a powerful tool for studying the structural properties of polycrystaline thin films. A typical application is the refinement of compositional depth profiles. Of genera interest are the depth profile of the Ga/(In+Ga)-ratio over the entire thickness of the thin film, as well as the depth profile of th Cu/(In+Ga)-ratio near the surface. In this respect the three stage process is a particular interesting deposition technique. A remarkable recrystalization of the entire thin film at the end of the second stage has a strong impact on Ga-gradients as well as on the Cu-depletion close to the surface. In this contribution we use the GIXRD technique to refine composititional depth profiles obtained by secondary ion mass spectrometry (SIMS). We demonstrate that structura changes near the surface due to the recrystalization can be monitored. In addition we are able measure the depth of a Cu-depleted surface layer with high accuracy.

scholarly journals X-ray Photoelectron Spectroscopy Analysis of Chitosan–Graphene Oxide-Based Composite Thin Films for Potential Optical Sensing Applications

Polymers ◽  
2021 ◽  
Vol 13 (3) ◽  
pp. 478
Author(s):  
Wan Mohd Ebtisyam Mustaqim Mohd Daniyal ◽  
Yap Wing Fen ◽  
Silvan Saleviter ◽  
Narong Chanlek ◽  
Hideki Nakajima ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Graphene Oxide ◽  
Photoelectron Spectroscopy ◽  
Functional Group ◽  
Optical Sensing ◽  
Composite Thin Films ◽  
Cobalt Ions ◽  
X Ray ◽  
Sensing Applications

In this study, X-ray photoelectron spectroscopy (XPS) was used to study chitosan–graphene oxide (chitosan–GO) incorporated with 4-(2-pyridylazo)resorcinol (PAR) and cadmium sulfide quantum dot (CdS QD) composite thin films for the potential optical sensing of cobalt ions (Co2+). From the XPS results, it was confirmed that carbon, oxygen, and nitrogen elements existed on the PAR–chitosan–GO thin film, while for CdS QD–chitosan–GO, the existence of carbon, oxygen, cadmium, nitrogen, and sulfur were confirmed. Further deconvolution of each element using the Gaussian–Lorentzian curve fitting program revealed the sub-peak component of each element and hence the corresponding functional group was identified. Next, investigation using surface plasmon resonance (SPR) optical sensor proved that both chitosan–GO-based thin films were able to detect Co2+ as low as 0.01 ppm for both composite thin films, while the PAR had the higher binding affinity. The interaction of the Co2+ with the thin films was characterized again using XPS to confirm the functional group involved during the reaction. The XPS results proved that primary amino in the PAR–chitosan–GO thin film contributed more important role for the reaction with Co2+, as in agreement with the SPR results.

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