Influence of Positive Substrate Bias on the Electrical Properties of ZnO:Al Films Prepared by DC Magnetron Sputtering

Journal of the Korean Physical Society ◽

10.3938/jkps.50.1697 ◽

2007 ◽

Vol 50 (6) ◽

pp. 1697 ◽

Author(s):

D. G. Lim ◽

G. S. Kang ◽

S. I. Kwon ◽

M. W. Park ◽

D. J. Kwak

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Substrate Bias ◽

Dc Magnetron Sputtering

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Substrate Bias Voltage Dependence of Electrical Properties for ZnO:Al Film by DC Magnetron Sputtering

Journal of the Korean Institute of Electrical and Electronic Material Engineers ◽

10.4313/jkem.2004.17.7.738 ◽

2004 ◽

Vol 17 (7) ◽

pp. 738-746

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Bias Voltage ◽

Voltage Dependence ◽

Substrate Bias ◽

Dc Magnetron Sputtering ◽

Substrate Bias Voltage ◽

Bias Voltage Dependence

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Fabrication and Electrical Properties of Highly Preferred Orientation Mo Thin Film by DC Magnetron Sputtering

ACTA PHOTONICA SINICA ◽

10.3788/gzxb20114009.1342 ◽

2011 ◽

Vol 40 (9) ◽

pp. 1342-1345

Author(s):

王震东王震东 ◽

赖珍荃赖珍荃 ◽

范定环范定环 ◽

徐鹏徐鹏

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Magnetron Sputtering ◽

Preferred Orientation ◽

Dc Magnetron Sputtering

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Systematic study of the evolution of texture and electrical properties of ZrNx thin films by reactive DC magnetron sputtering

Thin Solid Films ◽

10.1016/s0040-6090(03)01191-x ◽

2003 ◽

Vol 444 (1-2) ◽

pp. 111-119 ◽

Author(s):

Chuan-Pu Liu ◽

Heng-Ghieh Yang

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Systematic Study ◽

Dc Magnetron Sputtering

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Effect of substrate rotation speed and off-center deposition on the structural, optical, and electrical properties of AZO thin films fabricated by DC magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.5012883 ◽

2018 ◽

Vol 123 (16) ◽

pp. 165104 ◽

Author(s):

F. Turkoglu ◽

H. Koseoglu ◽

S. Zeybek ◽

M. Ozdemir ◽

G. Aygun ◽

...

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Rotation Speed ◽

Optical And Electrical Properties ◽

Dc Magnetron Sputtering ◽

Substrate Rotation

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Influence of annealing duration on structural, optical and electrical properties of AZO thin films grown on corning glass by dc magnetron sputtering

Journal of Physics Conference Series ◽

10.1088/1742-6596/1567/2/022003 ◽

2020 ◽

Vol 1567 ◽

pp. 022003

Author(s):

S Sugianto ◽

B Astuti ◽

P Marwoto ◽

N A Firmahaya ◽

D Aryanto ◽

...

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Annealing Duration ◽

Optical And Electrical Properties ◽

Dc Magnetron Sputtering ◽

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Phase change and electrical properties of thin films BaTiO/sub 3/ system made by RF/DC magnetron sputtering

Proceedings of 5th International Conference on Properties and Applications of Dielectric Materials ◽

10.1109/icpadm.1997.616622 ◽

2002 ◽

Author(s):

Min-Jong Song ◽

Choon-Bae Park ◽

Tae Wan Kim

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Phase Change ◽

Dc Magnetron Sputtering

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Tribological and electrical properties of nanocrystalline Cu films deposited by DC magnetron sputtering with varying temperature

Tribology International ◽

10.1016/j.triboint.2012.10.006 ◽

2013 ◽

Vol 58 ◽

pp. 79-84 ◽

Author(s):

M. Geetha ◽

N. Kumar ◽

K. Panda ◽

S. Dhara ◽

S. Dash ◽

...

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Dc Magnetron Sputtering ◽

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Influence of oxygen flow rate on the structural, optical and electrical properties of ZnO films grown by DC magnetron sputtering

Applied Physics A ◽

10.1007/s00339-016-9806-3 ◽

2016 ◽

Vol 122 (4) ◽

Author(s):

Chaya Ravi Gobbiner ◽

Muhammed Ali Avanee Veedu ◽

Dhananjaya Kekuda

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Flow Rate ◽

Oxygen Flow Rate ◽

Oxygen Flow ◽

Zno Films ◽

Optical And Electrical Properties ◽

Dc Magnetron Sputtering

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Magnetic And Electrical Properties Of Co-Sm Thin Films Deposited By DC Magnetron Sputtering

1997 IEEE International Magnetics Conference (INTERMAG'97) ◽

10.1109/intmag.1997.597990 ◽

2005 ◽

Author(s):

H.S. Cho ◽

J.R. Salem ◽

A.J. Kellock ◽

R.B. Beyers

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Dc Magnetron Sputtering ◽

Magnetic And Electrical Properties

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Thickness dependence of the structural and electrical properties of copper films deposited by dc magnetron sputtering technique

Microelectronics Journal ◽

10.1016/j.mejo.2005.09.016 ◽

2006 ◽

Vol 37 (7) ◽

pp. 608-612 ◽

Author(s):

Kah-Yoong Chan ◽

Teck-Yong Tou ◽

Bee-San Teo

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Thickness Dependence ◽

Copper Films ◽

Dc Magnetron Sputtering ◽

Structural And Electrical Properties

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