Femtosecond Laser Micromachining of High Quality Groove on Sapphire Surface
2012 ◽
Vol 217-219
◽
pp. 2213-2216
Keyword(s):
In this paper, high quality grooves were fabricated by femtosecond laser pulse on sapphire surface. Grooves were fabricated under different experimental conditions. The lateral and vertical machining precision was evaluated by scanning electron microscopy and profilometer. High quality grooves could be obtained at the condition of low pulse energy, high scanning-speed and increasing the number of laser scans. The relationship between the width and depth of the groove and the key parameters of femtosecond laser micromachining system was studied. Several samples of the high quality grooves were obtained by femtosecond laser pulses. High quality grooves have a potential application of the fabrication of sapphire-based devices.
Interaction of the Femtosecond Laser Pulses with the New Silica Nanocomposites Containing Au and CdS
2013 ◽
Vol 834-836
◽
pp. 60-63
◽
2012 ◽
Vol 78
(4)
◽
pp. 355-361
◽
Keyword(s):