Finite Element Analysis of 2-DOF Positioning Stage with a Gas Bearing Based on ANSYS
2014 ◽
Vol 1056
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pp. 149-153
Keyword(s):
In order to reach the requirements of the newest generation of wire bonder, gas bearing positioning stage directly driven by voice coil actuators is designed.In the stage,an air decoupling mechanism is used. And the finite element analysis software ANSYS was used to analyze the static and dynamic characterizes of the stage so that the structure meets the requirement of stiffness,and at the same time,the moving parts are as light as possible. The simulated results show that the maximum deformation of work platform is in the work surface and the deformation is in request scope.,the deformation of decoupling mechanism is in the main driving rod contact, but this has a little influence on the stage.
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