Model of Closed-Loop Detection System for Capacitive MEMS Accelerometer and its IC Realization

2012 ◽  
Vol 468-471 ◽  
pp. 2170-2175
Author(s):  
Bin Wang ◽  
He Ming Zhang ◽  
Hui Yong Hu ◽  
Zheng Yuan Zhang ◽  
Rong Xi Xuan ◽  
...  
Keyword(s):  
Closed Loop ◽  
Force Feedback ◽  
Detection System ◽  
Closed Loop System ◽  
Detection Range ◽  
Mems Accelerometer ◽  
Feedback Model ◽  
Loop Detection ◽  
Layout Area ◽  
Capacitive Mems

A type of closed-loop system model for capacitive MEMS accelerometer, with simple working clock , is presented in this paper. After establishing the force-feedback model and disgussing the magnitude of the feedback voltage, the readout interface IC for closed-loop detection is designed and the layout area of the ciruit is only 1435×2543 um2. Post simulation results indicated that the circuit has large detection range, high accuracy and linearity, giving evidence for the validity of our model.

A closed-loop readout interface for MEMS accelerometer with time-multiplexing electrostatic force feedback

2019 ◽  
Vol 33 (35) ◽  
pp. 1950447 ◽  
Author(s):  
Zhi Yuan Sun ◽  
Liang Yin ◽  
Jian Hai Yu
Keyword(s):  
Closed Loop ◽  
Force Feedback ◽  
Electrostatic Force ◽  
Critical Issue ◽  
Feedback Signal ◽  
Noise Spectral Density ◽  
Mems Accelerometer ◽  
Loop Transfer Function ◽  
Seismic Acquisition ◽  
Voltage Feedback

The noise and linearity performance of a MEMS accelerometer is a critical issue for land seismic acquisition applications. Incorporating closed-loop force feedback is an effective way to enhance those performances. However, additional electrode to exert the electrostatic force is typically not available and residue displacement of proof mass would introduce significant nonlinearity to the closed-loop transfer function, impairing the efficiency of the method. This paper proposes a switched-capacitor closed-loop readout interface for MEMS accelerometer which greatly alleviates those problem. First, the proposed system incorporates a time-multiplexing technique, thus the sensing and force feedback can be realized using the same electrode and get separated in time sequence. Furthermore, the cross-coupling of high-voltage feedback signal and weak sensing signal can be minimized. Second, a correlated double sampling (CDS) technique and a PID control mechanism is introduced in the loop. Thus, the two sources of residue displacement: interface mismatch and insufficient loop gain can be well-suppressed. The test results show that the proposed closed-loop MEMS accelerometer can achieve an SNR better than 120 dB, with an in-band noise spectral density lower than 500 ng/Hz[Formula: see text].

A single-mass self-resonating closed-loop capacitive MEMS accelerometer

2016 ◽  
Author(s):  
Talha Kose ◽  
Yunus Terzioglu ◽  
Kivanc Azgin ◽  
Tayfun Akin
Keyword(s):  
Closed Loop ◽  
Mems Accelerometer ◽  
Single Mass ◽  
Capacitive Mems

Noise Suppression of Optical Voltage Transducer by a Robust Control

2011 ◽  
Vol 418-420 ◽  
pp. 185-191
Author(s):  
Li Jing Li ◽  
Bing Jun Li ◽  
Lan Bi ◽  
Xi Zhang ◽  
Chun Xi Zhang
Keyword(s):  
Robust Control ◽  
Measurement Accuracy ◽  
Closed Loop ◽  
Noise Suppression ◽  
Design Criterion ◽  
Linear Matrix ◽  
Closed Loop System ◽  
Robust Controller ◽  
Voltage Transducer ◽  
Loop Detection

This paper investigates an H∞ robust controller for improving the measurement accuracy of the Optical Voltage Transducer with noise and parameter uncertainty. Firstly, the optical voltage transducer based on closed-loop detection is analyzed, and the model of the system is established concerning noise and uncertainty. Secondly, according to the model, this paper is theoretically devoted to the study of the Robust control for meeting the design target, while guarantees that the closed-loop system is asymptotically stable. Furthermore, we give a design criterion in terms of linear matrix inequality for the Robust control in the presence of noise and uncertainty. Finally, the experimental results demonstrate the effectiveness and feasibility of the robust controller.

Design of Closed-Loop Detection System for Optical Voltage Sensors Based on Pockels Effect

2013 ◽  
Vol 31 (12) ◽  
pp. 1921-1928 ◽  
Author(s):  
Hui Li ◽  
Lan Bi ◽  
Rui Wang ◽  
Lijing Li ◽  
Zhili Lin ◽  
...  
Keyword(s):  
Closed Loop ◽  
Detection System ◽  
Pockels Effect ◽  
Voltage Sensors ◽  
Loop Detection

A closed-loop detection system based on orthogonal phase locking for EISCAP sensor

2020 ◽  
Vol 860 ◽  
pp. 113925
Author(s):  
Dong Chen ◽  
Jin-tao Liang ◽  
Xing-yuan Tong ◽  
Hong-zhou Li ◽  
Jun-xiang Lai ◽  
...  
Keyword(s):  
Closed Loop ◽  
Detection System ◽  
Phase Locking ◽  
Loop Detection ◽  
Orthogonal Phase

scholarly journals Modeling and Analysis of a Closed-Loop System for High-Q MEMS Accelerometer Sensor

2018 ◽  
Vol 160 ◽  
pp. 05008
Author(s):  
Yalin Wang ◽  
Yongjun Yang
Keyword(s):  
Closed Loop ◽  
Electrostatic Force ◽  
Loop System ◽  
System Stability ◽  
Closed Loop System ◽  
Accelerometer Sensor ◽  
Loop Control ◽  
Mems Accelerometer ◽  
High Q ◽  
Noise Factors

High-Q sensing element is desirable for high performance while makes the loop control a great challenge. This paper presents a closed-loop system for high-Q capacitive MEMS accelerometer which has achieved loop control effectively. The proportional-derivative(PD)control is developed in the system to improve the system stability. In addition, pulse width modulation (PWM) electrostatic force feedback is designed in the loop to overcome the nonlinearity. Furthermore, a sigma-delta (ΣΔ) modulator with noise shaping is built to realize digital output. System model is built in Matlab/Simulink. The simulation results indicate that equivalent Q value is reduced to 1.5 to ensure stability and responsiveness of the system. The effective number of bits of system output is 14.7 bits. The system nonlinearity is less than 5‰. The equivalent linear model including main noise factors is built, and then a complete theory of noise and linearity analysis is established to contribute to common MEMS accelerometer research.

Force-Feedback Control in VIV Experiments

2003 ◽  
Author(s):  
O̸yvind N. Smogeli ◽  
Franz S. Hover ◽  
Michael S. Triantafyllou
Keyword(s):  
Control System ◽  
Feedback Control ◽  
Free Vibration ◽  
Closed Loop ◽  
Force Feedback ◽  
Amplitude Ratio ◽  
Free Vibrations ◽  
Closed Loop System ◽  
Control Scheme ◽  
Vibration Tests

A force-feedback control system for VIV experiments is designed and evaluated for the purpose of achieving high accuracy free vibration tests. Through an organized approach, this work details specific methods for minimizing the combined effect of mass and damping using control system fundamentals. The dynamics of the closed-loop system are analyzed, a numerical model constructed and a control scheme is chosen and implemented in real-time. The control system performance is evaluated by performing frequency response tests in air. Free vibrations of a smooth aluminum cylinder are performed at Reynolds number 19000. Test series with damping ratios of one, two and five percent are performed, all with nondimensional mass four. A peak amplitude ratio of 1.15 is observed for the case of lowest damping. Forced vibration tests with the same setup are performed and compared to the free vibration results, giving consistent results.

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